AT280727B - Method and device for introducing material into crucibles used in vacuum deposition systems - Google Patents
Method and device for introducing material into crucibles used in vacuum deposition systemsInfo
- Publication number
- AT280727B AT280727B AT985767A AT985767A AT280727B AT 280727 B AT280727 B AT 280727B AT 985767 A AT985767 A AT 985767A AT 985767 A AT985767 A AT 985767A AT 280727 B AT280727 B AT 280727B
- Authority
- AT
- Austria
- Prior art keywords
- vacuum deposition
- deposition systems
- introducing material
- crucibles used
- crucibles
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Silicon Compounds (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US59065666A | 1966-10-31 | 1966-10-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
AT280727B true AT280727B (en) | 1970-04-27 |
Family
ID=24363121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT985767A AT280727B (en) | 1966-10-31 | 1967-10-31 | Method and device for introducing material into crucibles used in vacuum deposition systems |
Country Status (12)
Country | Link |
---|---|
US (1) | US3504094A (en) |
AT (1) | AT280727B (en) |
BE (1) | BE705665A (en) |
CH (1) | CH516004A (en) |
DE (1) | DE1621205A1 (en) |
ES (1) | ES346591A1 (en) |
FR (1) | FR1541498A (en) |
GB (1) | GB1181698A (en) |
LU (1) | LU54738A1 (en) |
NL (1) | NL6714814A (en) |
NO (1) | NO119340B (en) |
SE (1) | SE334519B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0722696B2 (en) * | 1989-07-29 | 1995-03-15 | 新日本製鐵株式會社 | Method and apparatus for producing fine powder and method of using the same |
CN109594046B (en) * | 2019-01-23 | 2023-07-07 | 湖南宇晶机器股份有限公司 | Evaporation device for coating film |
CN117885181B (en) * | 2024-03-14 | 2024-05-31 | 施密特钢轨技术(昆山)有限公司 | Sand water conservancy diversion subassembly is penetrated to crucible |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1193783A (en) * | 1916-08-08 | Iiousk | ||
DE1175224B (en) * | 1959-04-17 | 1964-08-06 | Knapsack Ag | Device for the production of acetylene and ethylene by thermal splitting of hydrocarbons by means of a gaseous heat exchanger heated in an electric arc |
-
1966
- 1966-10-31 US US590656A patent/US3504094A/en not_active Expired - Lifetime
-
1967
- 1967-10-17 GB GB47166/67A patent/GB1181698A/en not_active Expired
- 1967-10-17 DE DE19671621205 patent/DE1621205A1/en active Pending
- 1967-10-20 FR FR125206A patent/FR1541498A/en not_active Expired
- 1967-10-25 LU LU54738D patent/LU54738A1/xx unknown
- 1967-10-26 BE BE705665D patent/BE705665A/xx unknown
- 1967-10-30 ES ES346591A patent/ES346591A1/en not_active Expired
- 1967-10-30 SE SE14822/67A patent/SE334519B/xx unknown
- 1967-10-30 NO NO170317A patent/NO119340B/no unknown
- 1967-10-31 NL NL6714814A patent/NL6714814A/xx unknown
- 1967-10-31 CH CH1522667A patent/CH516004A/en not_active IP Right Cessation
- 1967-10-31 AT AT985767A patent/AT280727B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
GB1181698A (en) | 1970-02-18 |
BE705665A (en) | 1968-03-01 |
DE1621205A1 (en) | 1971-06-03 |
US3504094A (en) | 1970-03-31 |
LU54738A1 (en) | 1968-01-26 |
CH516004A (en) | 1971-11-30 |
NL6714814A (en) | 1968-05-01 |
FR1541498A (en) | 1968-10-04 |
ES346591A1 (en) | 1969-01-01 |
NO119340B (en) | 1970-05-04 |
SE334519B (en) | 1971-04-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |