JPS57173705A - Method for checking mask for printed substrate - Google Patents

Method for checking mask for printed substrate

Info

Publication number
JPS57173705A
JPS57173705A JP5864381A JP5864381A JPS57173705A JP S57173705 A JPS57173705 A JP S57173705A JP 5864381 A JP5864381 A JP 5864381A JP 5864381 A JP5864381 A JP 5864381A JP S57173705 A JPS57173705 A JP S57173705A
Authority
JP
Japan
Prior art keywords
mask
light
concave
pattern
convex parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5864381A
Other languages
English (en)
Japanese (ja)
Other versions
JPS637602B2 (enrdf_load_stackoverflow
Inventor
Yasuhiko Hara
Koichi Tsukazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5864381A priority Critical patent/JPS57173705A/ja
Publication of JPS57173705A publication Critical patent/JPS57173705A/ja
Publication of JPS637602B2 publication Critical patent/JPS637602B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP5864381A 1981-04-20 1981-04-20 Method for checking mask for printed substrate Granted JPS57173705A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5864381A JPS57173705A (en) 1981-04-20 1981-04-20 Method for checking mask for printed substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5864381A JPS57173705A (en) 1981-04-20 1981-04-20 Method for checking mask for printed substrate

Publications (2)

Publication Number Publication Date
JPS57173705A true JPS57173705A (en) 1982-10-26
JPS637602B2 JPS637602B2 (enrdf_load_stackoverflow) 1988-02-17

Family

ID=13090256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5864381A Granted JPS57173705A (en) 1981-04-20 1981-04-20 Method for checking mask for printed substrate

Country Status (1)

Country Link
JP (1) JPS57173705A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005351671A (ja) * 2004-06-08 2005-12-22 Canon Inc 記録用シート検知装置、記録用シート検知装置の制御方法、情報記録装置、情報記録装置の制御方法及び制御プログラム

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03124519A (ja) * 1989-09-29 1991-05-28 Kataoka Bussan Kk ティーバッグの製造法及びその装置
JPH03162222A (ja) * 1989-11-22 1991-07-12 Kataoka Bussan Kk 三角錐形ティーバッグの製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005351671A (ja) * 2004-06-08 2005-12-22 Canon Inc 記録用シート検知装置、記録用シート検知装置の制御方法、情報記録装置、情報記録装置の制御方法及び制御プログラム
US8068237B2 (en) 2004-06-08 2011-11-29 Canon Kabushiki Kaisha Sheet type detection device that determines thickness and surface roughness of a sheet

Also Published As

Publication number Publication date
JPS637602B2 (enrdf_load_stackoverflow) 1988-02-17

Similar Documents

Publication Publication Date Title
KR960008272A (ko) 용기 마무리 치수 파라미터의 광학적 검사
KR970003760A (ko) 이물검사방법 및 장치
JPS5629108A (en) Electronic photometry sensor system for thread and hole
US2429331A (en) Photoelectric apparatus for inspection of paper strips
KR930010527A (ko) 조사를 이용한 표면상태 검사방법 및 그 장치
JPS56103304A (en) Electro optical inspecting device
WO1998052025A1 (fr) Procede et instrument de controle de surface
JPS647618A (en) Method and apparatus for exposing semiconductor
JPS54101390A (en) Foreign matter inspector
JPS5594145A (en) Method of and device for inspecting surface of article
JPH08334469A (ja) 錠剤等包装品検査装置
JPS57173705A (en) Method for checking mask for printed substrate
JPS56157841A (en) Detecting apparatus for surface defect of body
JPS55149830A (en) Inspection apparatus for appearance of spherical body
JPS5779454A (en) Detection of pattern used for analysis based on amynological agglutination reaction
JPS5667739A (en) Defect inspecting apparatus
JPS57189046A (en) Inspecting device for surface defect
JPS57186106A (en) Inspection device for surface
JPS56126745A (en) Automatic inspecting device for surface of plate material
JPS5737253A (en) Defect detection device for transparent body
JPS60222756A (ja) 異物検査装置
JPH03181807A (ja) 視覚装置
JPS57184957A (en) Defect inspecting device
JPS6423145A (en) Optical appearance inspection device
JPS63314449A (ja) びん口部の欠陥検出方法