JPS57168105A - Pattern checking device - Google Patents

Pattern checking device

Info

Publication number
JPS57168105A
JPS57168105A JP3504581A JP3504581A JPS57168105A JP S57168105 A JPS57168105 A JP S57168105A JP 3504581 A JP3504581 A JP 3504581A JP 3504581 A JP3504581 A JP 3504581A JP S57168105 A JPS57168105 A JP S57168105A
Authority
JP
Japan
Prior art keywords
data
circuit
pattern
inputted
quality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3504581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6256442B2 (OSRAM
Inventor
Kikuo Mita
Moritoshi Ando
Akifumi Muto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3504581A priority Critical patent/JPS57168105A/ja
Publication of JPS57168105A publication Critical patent/JPS57168105A/ja
Publication of JPS6256442B2 publication Critical patent/JPS6256442B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3504581A 1981-03-11 1981-03-11 Pattern checking device Granted JPS57168105A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3504581A JPS57168105A (en) 1981-03-11 1981-03-11 Pattern checking device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3504581A JPS57168105A (en) 1981-03-11 1981-03-11 Pattern checking device

Publications (2)

Publication Number Publication Date
JPS57168105A true JPS57168105A (en) 1982-10-16
JPS6256442B2 JPS6256442B2 (OSRAM) 1987-11-26

Family

ID=12431059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3504581A Granted JPS57168105A (en) 1981-03-11 1981-03-11 Pattern checking device

Country Status (1)

Country Link
JP (1) JPS57168105A (OSRAM)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6015504A (ja) * 1983-07-07 1985-01-26 Mitsubishi Rayon Co Ltd フオトマスク自動検査装置
JPS61277005A (ja) * 1985-05-31 1986-12-08 Nippon Denso Co Ltd チップ部品の実装検査装置
JPS6227604A (ja) * 1985-07-29 1987-02-05 Hitachi Electronics Eng Co Ltd パタ−ン検出装置
JPS6248748A (ja) * 1985-06-21 1987-03-03 Nippon Yunikaa Kk エチレン−アクリル酸エチル共重合体とエチレン−酢酸ビニル−塩化ビニル三元共重合体との混合物を基材とした組成物
JPS62150112A (ja) * 1985-12-25 1987-07-04 Hitachi Electronics Eng Co Ltd スクライブラインのパターン検出方法
JPS62299713A (ja) * 1986-06-19 1987-12-26 Tokico Ltd ワ−ク位置ずれ検知装置
JPH04194604A (ja) * 1990-11-27 1992-07-14 Dainippon Screen Mfg Co Ltd プリント基板のライン幅検査方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH068053U (ja) * 1992-07-06 1994-02-01 次雄 牧野 車両における、アクセル、ブレーキ及び警報装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6015504A (ja) * 1983-07-07 1985-01-26 Mitsubishi Rayon Co Ltd フオトマスク自動検査装置
JPS61277005A (ja) * 1985-05-31 1986-12-08 Nippon Denso Co Ltd チップ部品の実装検査装置
JPS6248748A (ja) * 1985-06-21 1987-03-03 Nippon Yunikaa Kk エチレン−アクリル酸エチル共重合体とエチレン−酢酸ビニル−塩化ビニル三元共重合体との混合物を基材とした組成物
JPS6227604A (ja) * 1985-07-29 1987-02-05 Hitachi Electronics Eng Co Ltd パタ−ン検出装置
JPS62150112A (ja) * 1985-12-25 1987-07-04 Hitachi Electronics Eng Co Ltd スクライブラインのパターン検出方法
JPS62299713A (ja) * 1986-06-19 1987-12-26 Tokico Ltd ワ−ク位置ずれ検知装置
JPH04194604A (ja) * 1990-11-27 1992-07-14 Dainippon Screen Mfg Co Ltd プリント基板のライン幅検査方法

Also Published As

Publication number Publication date
JPS6256442B2 (OSRAM) 1987-11-26

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