JPS57168105A - Pattern checking device - Google Patents

Abstract

PURPOSE: To judge the quality readily by using a small memory capacity, by reading the pattern data along the pattern width measuring direction and along the direction which crosses said direction out of a pattern memory circuit, and comparing the allowable dimension data based on the latter data with the former data.

CONSTITUTION: The pattern surface of a sample to be checked 1 is scanned by a TV camera 2, and the results are coded to the binary values by a binary coding circuit 3. The values are inputted into a memory circuit 4 and sent to a detecting circuit 5. Then the quality of the widths of the pattern lines are checked. In the detecting circuit 5 including a length measuring sensor 10, the signals from sensors (a) and (b) are inputted to a selecting circuit 11 which generates the allowable dimension data, and the upper limit bit data (f) and the lower limit bit data (g) are outputted to comparators 13 and 14. Meanwhile the signals from sensors (c) and (d) pass through an adder 12 and are compared with the upper limit bit data in the comparator 13. They are also compared with the lower limit bit data in the comparator 14 and the results are inputted to an inverter 15. Both results are inputted to the OR circuit 16, wherein quality is judged. Therefore the quality is readily judged by using small memory capacity.

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