JPS57167026A - Photo mask - Google Patents

Photo mask

Info

Publication number
JPS57167026A
JPS57167026A JP5398181A JP5398181A JPS57167026A JP S57167026 A JPS57167026 A JP S57167026A JP 5398181 A JP5398181 A JP 5398181A JP 5398181 A JP5398181 A JP 5398181A JP S57167026 A JPS57167026 A JP S57167026A
Authority
JP
Japan
Prior art keywords
thin film
light shielding
amorphous semiconductor
pattern
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5398181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS627537B2 (enrdf_load_stackoverflow
Inventor
Jun Uno
Teruhiko Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5398181A priority Critical patent/JPS57167026A/ja
Publication of JPS57167026A publication Critical patent/JPS57167026A/ja
Publication of JPS627537B2 publication Critical patent/JPS627537B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/331—Coatings for devices having potential barriers for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H10F77/334—Coatings for devices having potential barriers for filtering or shielding light, e.g. multicolour filters for photodetectors for shielding light, e.g. light blocking layers or cold shields for infrared detectors

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP5398181A 1981-04-08 1981-04-08 Photo mask Granted JPS57167026A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5398181A JPS57167026A (en) 1981-04-08 1981-04-08 Photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5398181A JPS57167026A (en) 1981-04-08 1981-04-08 Photo mask

Publications (2)

Publication Number Publication Date
JPS57167026A true JPS57167026A (en) 1982-10-14
JPS627537B2 JPS627537B2 (enrdf_load_stackoverflow) 1987-02-18

Family

ID=12957796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5398181A Granted JPS57167026A (en) 1981-04-08 1981-04-08 Photo mask

Country Status (1)

Country Link
JP (1) JPS57167026A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59123840A (ja) * 1982-12-29 1984-07-17 Konishiroku Photo Ind Co Ltd 露光マスクの製造方法
JP2021171968A (ja) * 2020-04-22 2021-11-01 理想科学工業株式会社 部品保持部材

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59123840A (ja) * 1982-12-29 1984-07-17 Konishiroku Photo Ind Co Ltd 露光マスクの製造方法
JP2021171968A (ja) * 2020-04-22 2021-11-01 理想科学工業株式会社 部品保持部材

Also Published As

Publication number Publication date
JPS627537B2 (enrdf_load_stackoverflow) 1987-02-18

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