JPS57123826A - Method for forming oxide thin film pattern - Google Patents
Method for forming oxide thin film patternInfo
- Publication number
- JPS57123826A JPS57123826A JP56009569A JP956981A JPS57123826A JP S57123826 A JPS57123826 A JP S57123826A JP 56009569 A JP56009569 A JP 56009569A JP 956981 A JP956981 A JP 956981A JP S57123826 A JPS57123826 A JP S57123826A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- oxide thin
- volume ratio
- solution
- hcl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
PURPOSE: To form a pattern of oxide thin film, in high dimensional accuracy, without leaving the insoluble materials at the edge, by etching an oxide thin film containing both Ba and Pb with a solution obtained by adding a specific volume ratio of HCl to an aqueous solution containing a specific volume ratio of HClO4.
CONSTITUTION: A BaPb1-xBixO3 thin film formed on a substrate is coated with a positive resist, exposed to light through a mask having a desired circuit pattern, and developed to obtain an oxide thin film composed of BaPb1-xBixO3 contaning both Ba and Pb. The unnecessary part of the oxide thin film is removed with an etching solution obtained by adding a 60W62% HCl O4 solution to water at a volume ratio of 20W60%, and adding a 35W37% HCl solution to the above solution at a volume ratio of 0.3W1%.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56009569A JPS57123826A (en) | 1981-01-27 | 1981-01-27 | Method for forming oxide thin film pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56009569A JPS57123826A (en) | 1981-01-27 | 1981-01-27 | Method for forming oxide thin film pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57123826A true JPS57123826A (en) | 1982-08-02 |
JPS6317773B2 JPS6317773B2 (en) | 1988-04-15 |
Family
ID=11723923
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56009569A Granted JPS57123826A (en) | 1981-01-27 | 1981-01-27 | Method for forming oxide thin film pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57123826A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5947783A (en) * | 1982-09-10 | 1984-03-17 | Nippon Telegr & Teleph Corp <Ntt> | Formation of pattern of oxide superconductor |
US5646095A (en) * | 1991-06-18 | 1997-07-08 | International Business Machines Corporation | Selective insulation etching for fabricating superconductor microcircuits |
US8246847B2 (en) * | 2005-09-12 | 2012-08-21 | Nippon Sheet Glass Company, Limited | Separating method for conductive ceramics sintered body |
US8409401B2 (en) | 2005-09-12 | 2013-04-02 | Nippon Sheet Glass Co., Ltd. | Separating method for dark ceramics sintered body |
-
1981
- 1981-01-27 JP JP56009569A patent/JPS57123826A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5947783A (en) * | 1982-09-10 | 1984-03-17 | Nippon Telegr & Teleph Corp <Ntt> | Formation of pattern of oxide superconductor |
JPH0343794B2 (en) * | 1982-09-10 | 1991-07-03 | Nippon Telegraph & Telephone | |
US5646095A (en) * | 1991-06-18 | 1997-07-08 | International Business Machines Corporation | Selective insulation etching for fabricating superconductor microcircuits |
US8246847B2 (en) * | 2005-09-12 | 2012-08-21 | Nippon Sheet Glass Company, Limited | Separating method for conductive ceramics sintered body |
US8409401B2 (en) | 2005-09-12 | 2013-04-02 | Nippon Sheet Glass Co., Ltd. | Separating method for dark ceramics sintered body |
Also Published As
Publication number | Publication date |
---|---|
JPS6317773B2 (en) | 1988-04-15 |
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