JPS57164525A - Device conveying semiconductor wafer into core tube of furnace - Google Patents

Device conveying semiconductor wafer into core tube of furnace

Info

Publication number
JPS57164525A
JPS57164525A JP4926281A JP4926281A JPS57164525A JP S57164525 A JPS57164525 A JP S57164525A JP 4926281 A JP4926281 A JP 4926281A JP 4926281 A JP4926281 A JP 4926281A JP S57164525 A JPS57164525 A JP S57164525A
Authority
JP
Japan
Prior art keywords
buffle
core tube
furnace
boat
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4926281A
Other languages
Japanese (ja)
Inventor
Kenichi Kuroiwa
Yoshihisa Takaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP4926281A priority Critical patent/JPS57164525A/en
Publication of JPS57164525A publication Critical patent/JPS57164525A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

PURPOSE:To maintain the inside of a core tube of furnace at positive pressure and to prevent alkaline contamination at the surface of a wafer by the counterflow of air by a method wherein a forward buffle is moved after a rear buffle is inserted into the furnace. CONSTITUTION:A boat 2 is inserted into a furnace core tube 1 until a rear buffle 5 reaches in the core tube 1 under the condition that a forward buffle 11 is raised, and the boat 2 is temporarily stopped at this point. Next, the forward buffle 11 is fallen by an operating arm 12 as shown in an arrow and a mounting area 10 for a semiconductor wafer is maintained at sufficient positive pressure to wait until the air left in the core tube 1 is sufficiently exhausted from the circumference of the rear buffle 5. Then, heat treatment is executed by moving the boat 2 as far as to a uniformly heating section 13. In this way, heat treatment can be executed without disturbing impurities and carried gas and without receiving containation due to the ambient air.
JP4926281A 1981-04-03 1981-04-03 Device conveying semiconductor wafer into core tube of furnace Pending JPS57164525A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4926281A JPS57164525A (en) 1981-04-03 1981-04-03 Device conveying semiconductor wafer into core tube of furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4926281A JPS57164525A (en) 1981-04-03 1981-04-03 Device conveying semiconductor wafer into core tube of furnace

Publications (1)

Publication Number Publication Date
JPS57164525A true JPS57164525A (en) 1982-10-09

Family

ID=12825907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4926281A Pending JPS57164525A (en) 1981-04-03 1981-04-03 Device conveying semiconductor wafer into core tube of furnace

Country Status (1)

Country Link
JP (1) JPS57164525A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61110444A (en) * 1984-11-02 1986-05-28 ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング Hold lattice package
CN112628782A (en) * 2021-01-12 2021-04-09 辽宁科技学院 Industrial flue gas desulfurization and dust removal device and implementation method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61110444A (en) * 1984-11-02 1986-05-28 ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング Hold lattice package
CN112628782A (en) * 2021-01-12 2021-04-09 辽宁科技学院 Industrial flue gas desulfurization and dust removal device and implementation method thereof

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