JPS6430213A - Boat loader - Google Patents
Boat loaderInfo
- Publication number
- JPS6430213A JPS6430213A JP62187203A JP18720387A JPS6430213A JP S6430213 A JPS6430213 A JP S6430213A JP 62187203 A JP62187203 A JP 62187203A JP 18720387 A JP18720387 A JP 18720387A JP S6430213 A JPS6430213 A JP S6430213A
- Authority
- JP
- Japan
- Prior art keywords
- boat
- exhaust
- loader
- scattering
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To prevent phosphorus mist from scattering and propagating out of a boat loader by a method wherein an exhaust system is installed to suck and exhaust the phosphorus mist scattering from a boat and wafer furthermore when the boat, after heat treatment, is drawn out of the loader, clean air feeding function is stopped to initiate the exhaust fuction. CONSTITUTION:When a heat treated wafer is drawn out into a boat loader, hot air and phosphorus mist are lifted above the wafer as a rising stream. This air stream is exhausted out of a clean room through an exhaust punching sheet 16 provided on overall ceiling part in the boat shifting channel by an exhaust system 20 installed in the channel. Furthermore, at this time, the feeding of clean air from the punching sheet 16 is stopped and the exhaust system 20 is to be started by opening a damper 21 of the system 20. Through these procedures, the scattering of hot air and phosphorus mist from the front of the loader can be prevented from occurring not to pollute the inside of the clean room and not to notably deteriorate the performance of other products of the semiconductor device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62187203A JPH0779092B2 (en) | 1987-07-27 | 1987-07-27 | Boat loader device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62187203A JPH0779092B2 (en) | 1987-07-27 | 1987-07-27 | Boat loader device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6430213A true JPS6430213A (en) | 1989-02-01 |
JPH0779092B2 JPH0779092B2 (en) | 1995-08-23 |
Family
ID=16201896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62187203A Expired - Lifetime JPH0779092B2 (en) | 1987-07-27 | 1987-07-27 | Boat loader device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0779092B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0325926A (en) * | 1989-06-22 | 1991-02-04 | Mitsubishi Electric Corp | Production device for semiconductor |
US5562383A (en) * | 1993-04-13 | 1996-10-08 | Tokyo Electron Kabushiki Kaisha | Treatment apparatus |
JP2006008744A (en) * | 2004-06-22 | 2006-01-12 | Asahi Kasei Chemicals Corp | Method for producing molded article of aromatic polycarbonate resin composition and molded article |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6236817A (en) * | 1985-08-12 | 1987-02-17 | Hitachi Ltd | Heat treatment device |
-
1987
- 1987-07-27 JP JP62187203A patent/JPH0779092B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6236817A (en) * | 1985-08-12 | 1987-02-17 | Hitachi Ltd | Heat treatment device |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0325926A (en) * | 1989-06-22 | 1991-02-04 | Mitsubishi Electric Corp | Production device for semiconductor |
US5562383A (en) * | 1993-04-13 | 1996-10-08 | Tokyo Electron Kabushiki Kaisha | Treatment apparatus |
US5829939A (en) * | 1993-04-13 | 1998-11-03 | Tokyo Electron Kabushiki Kaisha | Treatment apparatus |
JP2006008744A (en) * | 2004-06-22 | 2006-01-12 | Asahi Kasei Chemicals Corp | Method for producing molded article of aromatic polycarbonate resin composition and molded article |
Also Published As
Publication number | Publication date |
---|---|
JPH0779092B2 (en) | 1995-08-23 |
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