JPS6430213A - Boat loader - Google Patents

Boat loader

Info

Publication number
JPS6430213A
JPS6430213A JP62187203A JP18720387A JPS6430213A JP S6430213 A JPS6430213 A JP S6430213A JP 62187203 A JP62187203 A JP 62187203A JP 18720387 A JP18720387 A JP 18720387A JP S6430213 A JPS6430213 A JP S6430213A
Authority
JP
Japan
Prior art keywords
boat
exhaust
loader
scattering
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62187203A
Other languages
Japanese (ja)
Other versions
JPH0779092B2 (en
Inventor
Shoichi Nakagawa
Hidekazu Tsujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP62187203A priority Critical patent/JPH0779092B2/en
Publication of JPS6430213A publication Critical patent/JPS6430213A/en
Publication of JPH0779092B2 publication Critical patent/JPH0779092B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To prevent phosphorus mist from scattering and propagating out of a boat loader by a method wherein an exhaust system is installed to suck and exhaust the phosphorus mist scattering from a boat and wafer furthermore when the boat, after heat treatment, is drawn out of the loader, clean air feeding function is stopped to initiate the exhaust fuction. CONSTITUTION:When a heat treated wafer is drawn out into a boat loader, hot air and phosphorus mist are lifted above the wafer as a rising stream. This air stream is exhausted out of a clean room through an exhaust punching sheet 16 provided on overall ceiling part in the boat shifting channel by an exhaust system 20 installed in the channel. Furthermore, at this time, the feeding of clean air from the punching sheet 16 is stopped and the exhaust system 20 is to be started by opening a damper 21 of the system 20. Through these procedures, the scattering of hot air and phosphorus mist from the front of the loader can be prevented from occurring not to pollute the inside of the clean room and not to notably deteriorate the performance of other products of the semiconductor device.
JP62187203A 1987-07-27 1987-07-27 Boat loader device Expired - Lifetime JPH0779092B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62187203A JPH0779092B2 (en) 1987-07-27 1987-07-27 Boat loader device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62187203A JPH0779092B2 (en) 1987-07-27 1987-07-27 Boat loader device

Publications (2)

Publication Number Publication Date
JPS6430213A true JPS6430213A (en) 1989-02-01
JPH0779092B2 JPH0779092B2 (en) 1995-08-23

Family

ID=16201896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62187203A Expired - Lifetime JPH0779092B2 (en) 1987-07-27 1987-07-27 Boat loader device

Country Status (1)

Country Link
JP (1) JPH0779092B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0325926A (en) * 1989-06-22 1991-02-04 Mitsubishi Electric Corp Production device for semiconductor
US5562383A (en) * 1993-04-13 1996-10-08 Tokyo Electron Kabushiki Kaisha Treatment apparatus
JP2006008744A (en) * 2004-06-22 2006-01-12 Asahi Kasei Chemicals Corp Method for producing molded article of aromatic polycarbonate resin composition and molded article

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236817A (en) * 1985-08-12 1987-02-17 Hitachi Ltd Heat treatment device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236817A (en) * 1985-08-12 1987-02-17 Hitachi Ltd Heat treatment device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0325926A (en) * 1989-06-22 1991-02-04 Mitsubishi Electric Corp Production device for semiconductor
US5562383A (en) * 1993-04-13 1996-10-08 Tokyo Electron Kabushiki Kaisha Treatment apparatus
US5829939A (en) * 1993-04-13 1998-11-03 Tokyo Electron Kabushiki Kaisha Treatment apparatus
JP2006008744A (en) * 2004-06-22 2006-01-12 Asahi Kasei Chemicals Corp Method for producing molded article of aromatic polycarbonate resin composition and molded article

Also Published As

Publication number Publication date
JPH0779092B2 (en) 1995-08-23

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