JPS5565431A - Semiconductor heating core tube - Google Patents
Semiconductor heating core tubeInfo
- Publication number
- JPS5565431A JPS5565431A JP13886178A JP13886178A JPS5565431A JP S5565431 A JPS5565431 A JP S5565431A JP 13886178 A JP13886178 A JP 13886178A JP 13886178 A JP13886178 A JP 13886178A JP S5565431 A JPS5565431 A JP S5565431A
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- gas leading
- thermometry
- gas
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Furnace Details (AREA)
Abstract
PURPOSE: To simplify thermometry and enable thermometry also from a gas leading- in cylinder by providing a gas leading-in cylinder of core tube for wafer heat treatment eccentrically to a cylinder of heat resisting material.
CONSTITUTION: A core tube 11 for semiconductor wafer heat treatment is composed of a cylinder 11a of heat-resisting material, a gas leading-in tube 11b and a flange 11c and the inside of the cylinder 11a is made an atmosphere heating semiconductor with gas out of a gas leading-in. One end of said cylinder 11a is made open and at another end a gas leading-in cylinder 11b is formed extrusively so that it may stand in a straight line with the inside surface of a part of the cylinder 11a eccentrically and through a passage, connecting a flange 11c with a gas source 2 for forming a heating atmosphere. Further it is so made as to enable a thermocouplemeter 3 to be inserted from the flange on the gas leading-in cylinder side to perform thermometry from an open end of the cylinder 11a and also to enable thermometry from the gas leading-in cylinder side.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13886178A JPS5565431A (en) | 1978-11-13 | 1978-11-13 | Semiconductor heating core tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13886178A JPS5565431A (en) | 1978-11-13 | 1978-11-13 | Semiconductor heating core tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5565431A true JPS5565431A (en) | 1980-05-16 |
Family
ID=15231843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13886178A Pending JPS5565431A (en) | 1978-11-13 | 1978-11-13 | Semiconductor heating core tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5565431A (en) |
-
1978
- 1978-11-13 JP JP13886178A patent/JPS5565431A/en active Pending
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