JPS57152462A - Manufacture of photoconductive member - Google Patents
Manufacture of photoconductive memberInfo
- Publication number
- JPS57152462A JPS57152462A JP56037440A JP3744081A JPS57152462A JP S57152462 A JPS57152462 A JP S57152462A JP 56037440 A JP56037440 A JP 56037440A JP 3744081 A JP3744081 A JP 3744081A JP S57152462 A JPS57152462 A JP S57152462A
- Authority
- JP
- Japan
- Prior art keywords
- compounds
- photoconductive
- photoconductive layer
- halogen
- mixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 150000001875 compounds Chemical class 0.000 abstract 5
- 239000007858 starting material Substances 0.000 abstract 3
- 229910007245 Si2Cl6 Inorganic materials 0.000 abstract 1
- 229910007260 Si2F6 Inorganic materials 0.000 abstract 1
- 229910007264 Si2H6 Inorganic materials 0.000 abstract 1
- 229910005096 Si3H8 Inorganic materials 0.000 abstract 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 238000010891 electric arc Methods 0.000 abstract 1
- 229910052736 halogen Inorganic materials 0.000 abstract 1
- 125000005843 halogen group Chemical group 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 150000004756 silanes Chemical class 0.000 abstract 1
- LXEXBJXDGVGRAR-UHFFFAOYSA-N trichloro(trichlorosilyl)silane Chemical compound Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl LXEXBJXDGVGRAR-UHFFFAOYSA-N 0.000 abstract 1
- SDNBGJALFMSQER-UHFFFAOYSA-N trifluoro(trifluorosilyl)silane Chemical compound F[Si](F)(F)[Si](F)(F)F SDNBGJALFMSQER-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Light Receiving Elements (AREA)
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56037440A JPS57152462A (en) | 1981-03-16 | 1981-03-16 | Manufacture of photoconductive member |
| DE3208494A DE3208494C2 (de) | 1981-03-09 | 1982-03-09 | Verfahren zur Herstellung eines fotoleitfähigen Elements |
| US06/867,624 US4721664A (en) | 1981-03-09 | 1986-05-27 | Silicon film deposition from mixture of silanes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56037440A JPS57152462A (en) | 1981-03-16 | 1981-03-16 | Manufacture of photoconductive member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57152462A true JPS57152462A (en) | 1982-09-20 |
| JPS613874B2 JPS613874B2 (enExample) | 1986-02-05 |
Family
ID=12497564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56037440A Granted JPS57152462A (en) | 1981-03-09 | 1981-03-16 | Manufacture of photoconductive member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57152462A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57174450A (en) * | 1981-04-21 | 1982-10-27 | Canon Inc | Production of photoconductive member |
| JPS6068050A (ja) * | 1983-08-19 | 1985-04-18 | エナージー・コンバーション・デバイセス・インコーポレーテッド | 化学種の検出方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5553331A (en) * | 1978-10-17 | 1980-04-18 | Canon Inc | Electrophotographic photoreceptor |
-
1981
- 1981-03-16 JP JP56037440A patent/JPS57152462A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5553331A (en) * | 1978-10-17 | 1980-04-18 | Canon Inc | Electrophotographic photoreceptor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57174450A (en) * | 1981-04-21 | 1982-10-27 | Canon Inc | Production of photoconductive member |
| JPS6068050A (ja) * | 1983-08-19 | 1985-04-18 | エナージー・コンバーション・デバイセス・インコーポレーテッド | 化学種の検出方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS613874B2 (enExample) | 1986-02-05 |
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