JPS5680128A - Manufacture of thin film - Google Patents
Manufacture of thin filmInfo
- Publication number
- JPS5680128A JPS5680128A JP15858779A JP15858779A JPS5680128A JP S5680128 A JPS5680128 A JP S5680128A JP 15858779 A JP15858779 A JP 15858779A JP 15858779 A JP15858779 A JP 15858779A JP S5680128 A JPS5680128 A JP S5680128A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- productivity
- substrates
- yield
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Photovoltaic Devices (AREA)
Abstract
PURPOSE:To increase the productivity and the yield of raw material gas by juxtaposing two substrates for installation in forming a thin film by a CVD method. CONSTITUTION:Two substrates 6 are juxtaposed and installed on a substrate support base 7 in forming a thin film requiring heavy dimension such as amorphous Si film solar batteries or the like on only one side of the substrate by a CVD method. In this way, the productivity will be increased by eliminating the mask formation to interrupt the thin film formation to an unnecessary side. Furthermore, the yield of raw material gas will be increased as the thin film is not grown on the juxtaposed side.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15858779A JPS5680128A (en) | 1979-12-05 | 1979-12-05 | Manufacture of thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15858779A JPS5680128A (en) | 1979-12-05 | 1979-12-05 | Manufacture of thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5680128A true JPS5680128A (en) | 1981-07-01 |
JPS6239533B2 JPS6239533B2 (en) | 1987-08-24 |
Family
ID=15674943
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15858779A Granted JPS5680128A (en) | 1979-12-05 | 1979-12-05 | Manufacture of thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5680128A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58174570A (en) * | 1982-03-29 | 1983-10-13 | エナージー・コンバーション・デバイセス・インコーポレーテッド | Glow discharge deposition device containing non-horizontally placed cathode |
US5364481A (en) * | 1992-07-24 | 1994-11-15 | Fuji Electric Co., Ltd. | Apparatus for manufacturing a thin-film photovoltaic conversion device |
EP1546432A1 (en) * | 2002-08-27 | 2005-06-29 | Energy Conversion Devices, Inc. | High throughput deposition apparatus |
JP2017108083A (en) * | 2015-12-11 | 2017-06-15 | 三菱電機株式会社 | Method for manufacturing solar battery |
JP2018093200A (en) * | 2016-12-05 | 2018-06-14 | エルジー エレクトロニクス インコーポレイティド | Method of manufacturing solar cell |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01112317U (en) * | 1988-01-20 | 1989-07-28 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53132268A (en) * | 1977-04-22 | 1978-11-17 | Nec Corp | Vapor phase epitaxial method |
-
1979
- 1979-12-05 JP JP15858779A patent/JPS5680128A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53132268A (en) * | 1977-04-22 | 1978-11-17 | Nec Corp | Vapor phase epitaxial method |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58174570A (en) * | 1982-03-29 | 1983-10-13 | エナージー・コンバーション・デバイセス・インコーポレーテッド | Glow discharge deposition device containing non-horizontally placed cathode |
JPH0468390B2 (en) * | 1982-03-29 | 1992-11-02 | Enaajii Konbaajon Debaisesu Inc | |
US5364481A (en) * | 1992-07-24 | 1994-11-15 | Fuji Electric Co., Ltd. | Apparatus for manufacturing a thin-film photovoltaic conversion device |
EP1546432A1 (en) * | 2002-08-27 | 2005-06-29 | Energy Conversion Devices, Inc. | High throughput deposition apparatus |
EP1546432A4 (en) * | 2002-08-27 | 2012-03-28 | Energy Conversion Devices Inc | High throughput deposition apparatus |
JP2017108083A (en) * | 2015-12-11 | 2017-06-15 | 三菱電機株式会社 | Method for manufacturing solar battery |
JP2018093200A (en) * | 2016-12-05 | 2018-06-14 | エルジー エレクトロニクス インコーポレイティド | Method of manufacturing solar cell |
Also Published As
Publication number | Publication date |
---|---|
JPS6239533B2 (en) | 1987-08-24 |
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