JPS57149728A - Vapor growing device - Google Patents
Vapor growing deviceInfo
- Publication number
- JPS57149728A JPS57149728A JP3506181A JP3506181A JPS57149728A JP S57149728 A JPS57149728 A JP S57149728A JP 3506181 A JP3506181 A JP 3506181A JP 3506181 A JP3506181 A JP 3506181A JP S57149728 A JPS57149728 A JP S57149728A
- Authority
- JP
- Japan
- Prior art keywords
- cover
- film
- substrate
- quartz
- approximately
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3506181A JPS57149728A (en) | 1981-03-11 | 1981-03-11 | Vapor growing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3506181A JPS57149728A (en) | 1981-03-11 | 1981-03-11 | Vapor growing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57149728A true JPS57149728A (en) | 1982-09-16 |
Family
ID=12431501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3506181A Pending JPS57149728A (en) | 1981-03-11 | 1981-03-11 | Vapor growing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57149728A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6298613A (ja) * | 1985-10-24 | 1987-05-08 | Matsushita Electric Ind Co Ltd | 気相成長装置 |
JPH03171719A (ja) * | 1989-11-30 | 1991-07-25 | Nec Corp | 気相成長装置 |
JP2018060929A (ja) * | 2016-10-06 | 2018-04-12 | クアーズテック株式会社 | サセプタ |
-
1981
- 1981-03-11 JP JP3506181A patent/JPS57149728A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6298613A (ja) * | 1985-10-24 | 1987-05-08 | Matsushita Electric Ind Co Ltd | 気相成長装置 |
JPH0545052B2 (ja) * | 1985-10-24 | 1993-07-08 | Matsushita Electric Ind Co Ltd | |
JPH03171719A (ja) * | 1989-11-30 | 1991-07-25 | Nec Corp | 気相成長装置 |
JP2018060929A (ja) * | 2016-10-06 | 2018-04-12 | クアーズテック株式会社 | サセプタ |
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