JPS57143845A - Formation of multi-layer wiring composition - Google Patents

Formation of multi-layer wiring composition

Info

Publication number
JPS57143845A
JPS57143845A JP2777681A JP2777681A JPS57143845A JP S57143845 A JPS57143845 A JP S57143845A JP 2777681 A JP2777681 A JP 2777681A JP 2777681 A JP2777681 A JP 2777681A JP S57143845 A JPS57143845 A JP S57143845A
Authority
JP
Japan
Prior art keywords
insulation
layer
vapor phase
phase growth
level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2777681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332260B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Goto
Hiroshi Tokunaga
Ryoji Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2777681A priority Critical patent/JPS57143845A/ja
Publication of JPS57143845A publication Critical patent/JPS57143845A/ja
Publication of JPS6332260B2 publication Critical patent/JPS6332260B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Heads (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP2777681A 1981-02-27 1981-02-27 Formation of multi-layer wiring composition Granted JPS57143845A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2777681A JPS57143845A (en) 1981-02-27 1981-02-27 Formation of multi-layer wiring composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2777681A JPS57143845A (en) 1981-02-27 1981-02-27 Formation of multi-layer wiring composition

Publications (2)

Publication Number Publication Date
JPS57143845A true JPS57143845A (en) 1982-09-06
JPS6332260B2 JPS6332260B2 (enrdf_load_stackoverflow) 1988-06-29

Family

ID=12230371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2777681A Granted JPS57143845A (en) 1981-02-27 1981-02-27 Formation of multi-layer wiring composition

Country Status (1)

Country Link
JP (1) JPS57143845A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58203613A (ja) * 1982-05-24 1983-11-28 Hitachi Ltd 薄膜磁気ヘツド
JPS6066435A (ja) * 1983-09-22 1985-04-16 Matsushita Electric Ind Co Ltd 薄膜形成方法
JPS60231340A (ja) * 1984-04-27 1985-11-16 Sony Corp 半導体装置の製法
JPS63172444A (ja) * 1987-01-10 1988-07-16 Toshiba Corp 半導体装置の製造方法
JPH0193148A (ja) * 1987-10-05 1989-04-12 Nec Corp 半導体装置の製造方法
JPH01143351A (ja) * 1987-11-30 1989-06-05 Fujitsu Ltd 半導体記憶装置及びその製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58203613A (ja) * 1982-05-24 1983-11-28 Hitachi Ltd 薄膜磁気ヘツド
JPS6066435A (ja) * 1983-09-22 1985-04-16 Matsushita Electric Ind Co Ltd 薄膜形成方法
JPS60231340A (ja) * 1984-04-27 1985-11-16 Sony Corp 半導体装置の製法
JPS63172444A (ja) * 1987-01-10 1988-07-16 Toshiba Corp 半導体装置の製造方法
JPH0193148A (ja) * 1987-10-05 1989-04-12 Nec Corp 半導体装置の製造方法
JPH01143351A (ja) * 1987-11-30 1989-06-05 Fujitsu Ltd 半導体記憶装置及びその製造方法

Also Published As

Publication number Publication date
JPS6332260B2 (enrdf_load_stackoverflow) 1988-06-29

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