JPS57136931A - Photochemical reaction device - Google Patents

Photochemical reaction device

Info

Publication number
JPS57136931A
JPS57136931A JP2203081A JP2203081A JPS57136931A JP S57136931 A JPS57136931 A JP S57136931A JP 2203081 A JP2203081 A JP 2203081A JP 2203081 A JP2203081 A JP 2203081A JP S57136931 A JPS57136931 A JP S57136931A
Authority
JP
Japan
Prior art keywords
windows
vapor phase
light
transmission
photochemically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2203081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138269B2 (enrdf_load_stackoverflow
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP2203081A priority Critical patent/JPS57136931A/ja
Publication of JPS57136931A publication Critical patent/JPS57136931A/ja
Publication of JPS6138269B2 publication Critical patent/JPS6138269B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/123—Ultraviolet light

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2203081A 1981-02-17 1981-02-17 Photochemical reaction device Granted JPS57136931A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2203081A JPS57136931A (en) 1981-02-17 1981-02-17 Photochemical reaction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2203081A JPS57136931A (en) 1981-02-17 1981-02-17 Photochemical reaction device

Publications (2)

Publication Number Publication Date
JPS57136931A true JPS57136931A (en) 1982-08-24
JPS6138269B2 JPS6138269B2 (enrdf_load_stackoverflow) 1986-08-28

Family

ID=12071574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2203081A Granted JPS57136931A (en) 1981-02-17 1981-02-17 Photochemical reaction device

Country Status (1)

Country Link
JP (1) JPS57136931A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59194440A (ja) * 1983-04-18 1984-11-05 Mitsubishi Electric Corp パタ−ン形成装置
JPS6063534A (ja) * 1983-09-17 1985-04-11 Mitsubishi Electric Corp 微細加工方法
JPS62238369A (ja) * 1986-04-09 1987-10-19 Nissin Electric Co Ltd 光ｃｖｄ装置
JPS63199433A (ja) * 1987-02-16 1988-08-17 Toshiba Corp Ｃｖｄ装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59194440A (ja) * 1983-04-18 1984-11-05 Mitsubishi Electric Corp パタ−ン形成装置
JPS6063534A (ja) * 1983-09-17 1985-04-11 Mitsubishi Electric Corp 微細加工方法
JPS62238369A (ja) * 1986-04-09 1987-10-19 Nissin Electric Co Ltd 光ｃｖｄ装置
JPS63199433A (ja) * 1987-02-16 1988-08-17 Toshiba Corp Ｃｖｄ装置

Also Published As

Publication number Publication date
JPS6138269B2 (enrdf_load_stackoverflow) 1986-08-28

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