JPS6138269B2 - - Google Patents
Info
- Publication number
- JPS6138269B2 JPS6138269B2 JP2203081A JP2203081A JPS6138269B2 JP S6138269 B2 JPS6138269 B2 JP S6138269B2 JP 2203081 A JP2203081 A JP 2203081A JP 2203081 A JP2203081 A JP 2203081A JP S6138269 B2 JPS6138269 B2 JP S6138269B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- light
- film
- nozzle
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 29
- 238000006552 photochemical reaction Methods 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 11
- 239000010453 quartz Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 239000012808 vapor phase Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- VSQYNPJPULBZKU-UHFFFAOYSA-N mercury xenon Chemical compound [Xe].[Hg] VSQYNPJPULBZKU-UHFFFAOYSA-N 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/122—Incoherent waves
- B01J19/123—Ultraviolet light
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2203081A JPS57136931A (en) | 1981-02-17 | 1981-02-17 | Photochemical reaction device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2203081A JPS57136931A (en) | 1981-02-17 | 1981-02-17 | Photochemical reaction device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57136931A JPS57136931A (en) | 1982-08-24 |
| JPS6138269B2 true JPS6138269B2 (enrdf_load_stackoverflow) | 1986-08-28 |
Family
ID=12071574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2203081A Granted JPS57136931A (en) | 1981-02-17 | 1981-02-17 | Photochemical reaction device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57136931A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59194440A (ja) * | 1983-04-18 | 1984-11-05 | Mitsubishi Electric Corp | パタ−ン形成装置 |
| JPS6063534A (ja) * | 1983-09-17 | 1985-04-11 | Mitsubishi Electric Corp | 微細加工方法 |
| JPS62238369A (ja) * | 1986-04-09 | 1987-10-19 | Nissin Electric Co Ltd | 光ｃｖｄ装置 |
| JP2506100B2 (ja) * | 1987-02-16 | 1996-06-12 | 株式会社東芝 | Ｃｖｄ装置 |
-
1981
- 1981-02-17 JP JP2203081A patent/JPS57136931A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57136931A (en) | 1982-08-24 |
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