JPS5788003A - Ozonizer - Google Patents

Ozonizer

Info

Publication number
JPS5788003A
JPS5788003A JP16327280A JP16327280A JPS5788003A JP S5788003 A JPS5788003 A JP S5788003A JP 16327280 A JP16327280 A JP 16327280A JP 16327280 A JP16327280 A JP 16327280A JP S5788003 A JPS5788003 A JP S5788003A
Authority
JP
Japan
Prior art keywords
ozone
oxygen
tube
ultraviolet rays
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16327280A
Other languages
Japanese (ja)
Inventor
Hiroto Nagatomo
Tetsuya Takagaki
Masakuni Akiba
Hiroshi Maejima
Atsushi Fujisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16327280A priority Critical patent/JPS5788003A/en
Publication of JPS5788003A publication Critical patent/JPS5788003A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/123—Ultra-violet light

Abstract

PURPOSE:To generate ozone free from dust and suitable for cleaning a semiconductor wafer by passing oxygen through an ozone producing tube such as a quartz tube, where it is irradiated with ultraviolet rays. CONSTITUTION:Oxygen is introduced into an ozone producing tube 10 made of quartz from an oxygen source 13 through an introduction path 11 and a filter 14, and it is supplied to an apparatus 15 using ozone through a discharge path 12. At this time, part of the oxygen passing through the tube 10 is converted into ozone by the action of ultraviolet rays irradiated from sources 16 emitting ultraviolet rays such as ultraviolet lamps arranged around the tube 10. Thus, oxygen contg. ozone is produced.
JP16327280A 1980-11-21 1980-11-21 Ozonizer Pending JPS5788003A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16327280A JPS5788003A (en) 1980-11-21 1980-11-21 Ozonizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16327280A JPS5788003A (en) 1980-11-21 1980-11-21 Ozonizer

Publications (1)

Publication Number Publication Date
JPS5788003A true JPS5788003A (en) 1982-06-01

Family

ID=15770650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16327280A Pending JPS5788003A (en) 1980-11-21 1980-11-21 Ozonizer

Country Status (1)

Country Link
JP (1) JPS5788003A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125131A (en) * 1984-11-22 1986-06-12 Chlorine Eng Corp Ltd Washing and/or ashing method for ic substrate
JPH06305704A (en) * 1993-04-20 1994-11-01 Plant Service:Kk High-precision quantitative ozonizer
JPH0849209A (en) * 1994-08-05 1996-02-20 Mitsuru Yamaguchi Backing material for artificial lawn
WO2001002292A1 (en) * 1999-07-02 2001-01-11 Toshinori Kuroda Ozone generating device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125131A (en) * 1984-11-22 1986-06-12 Chlorine Eng Corp Ltd Washing and/or ashing method for ic substrate
JPH06305704A (en) * 1993-04-20 1994-11-01 Plant Service:Kk High-precision quantitative ozonizer
JPH0849209A (en) * 1994-08-05 1996-02-20 Mitsuru Yamaguchi Backing material for artificial lawn
WO2001002292A1 (en) * 1999-07-02 2001-01-11 Toshinori Kuroda Ozone generating device

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