WO2001002292A1 - Ozone generating device - Google Patents

Ozone generating device Download PDF

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Publication number
WO2001002292A1
WO2001002292A1 PCT/JP2000/004415 JP0004415W WO0102292A1 WO 2001002292 A1 WO2001002292 A1 WO 2001002292A1 JP 0004415 W JP0004415 W JP 0004415W WO 0102292 A1 WO0102292 A1 WO 0102292A1
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WO
WIPO (PCT)
Prior art keywords
ozone
tube
ultraviolet
ozone generator
generating means
Prior art date
Application number
PCT/JP2000/004415
Other languages
French (fr)
Japanese (ja)
Inventor
Toshinori Kuroda
Yasuo Matsunaga
Takeshi Hata
Yoko Hinoshita
Masumi Sumi
Original Assignee
Toshinori Kuroda
Yasuo Matsunaga
Takeshi Hata
Yoko Hinoshita
Masumi Sumi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11222867A external-priority patent/JP2001017845A/en
Priority claimed from JP11225613A external-priority patent/JP2001017985A/en
Priority claimed from JP11241962A external-priority patent/JP2001039703A/en
Application filed by Toshinori Kuroda, Yasuo Matsunaga, Takeshi Hata, Yoko Hinoshita, Masumi Sumi filed Critical Toshinori Kuroda
Priority to AU57086/00A priority Critical patent/AU5708600A/en
Publication of WO2001002292A1 publication Critical patent/WO2001002292A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/123—Ultraviolet light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J7/00—Apparatus for generating gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0875—Gas

Definitions

  • the present invention relates to an ozone generator which is used for producing ozone water, deodorizing indoors, sterilizing, and the like, and in particular, can be compactly and simply constructed.
  • a discharge method As a method for generating ozone, a discharge method, an ultraviolet irradiation method, a water electrolysis method, and the like are known.
  • the discharge method is not preferable to use as it is because nitrogen oxides (NOx) are generated by discharging into air.
  • NOx nitrogen oxides
  • an ozone production apparatus using a water electrolysis method has a problem that portability is poor due to its large size.
  • an ozone generator using an ultraviolet irradiation method which can be made compact and does not generate NO X, has been put to practical use.
  • an ozone generator using such an ultraviolet irradiation method an ozone generator described in Japanese Patent Application Laid-Open No. 2000-84060 is known.
  • a structure is generally known in which ultraviolet rays are transmitted from the outside of a glass tube through which raw materials pass.
  • Ozone generators such as those described above have been used, for example, to disinfect and deodorize the interior of automobiles and to deodorize in refrigerators. Is desired to be compact and simple. Therefore, an object of the present invention is to provide an ozone generating apparatus capable of making the apparatus itself compact and simple. Disclosure of the invention
  • an ozone generator is an ozone generator that generates ozone by irradiating a raw material gas with ultraviolet light. Pumps and other ultraviolet generating devices, and an ultraviolet transmitting glass tube provided along the ozone generating means.
  • the raw material gas is supplied from one end and generated inside from the other end. It is equipped with an ozone take-out tube for taking out ozone.
  • the ozone generator according to the present invention is the above-mentioned ozone generator, further comprising a plurality of the ozone outlet pipes provided around the ozone generator.
  • the ozone generator according to the present invention is the ozone generator described above, further comprising: installing the ozone generating means in the inner tube of a double tube including an inner tube and an outer tube; And a space between the outer tube and the outer tube functions as the ozone extracting tube.
  • the ozone generator according to the present invention is the above-mentioned ozone generator, further comprising: installing the ozone generating means in the inner tube of a double tube including an inner tube and an outer tube; And a plurality of the ozone take-out tubes arranged between the outer tube and the outer tube.
  • the ozone generator in the ozone generator described above, the ozone generator is accommodated in a housing, and the ozone outlet tube is provided so as to penetrate the housing.
  • an ozone generator is an ozone generator that generates ozone by irradiating a raw material gas with ultraviolet light, wherein the ozone generator includes an ultraviolet lamp and another ultraviolet generator, and an ozone generator.
  • FIG. 1 is a configuration diagram illustrating an ozone generation device according to a first embodiment of the present invention.
  • FIG. 2 is a configuration diagram illustrating an ozone generation device according to a second embodiment of the present invention.
  • FIG. 3 is a configuration diagram showing an ozone generator according to Embodiment 3 of the present invention.
  • FIG. 4 is a configuration diagram showing an ozone generator according to Embodiment 4 of the present invention.
  • FIG. 5 is a radial cross-sectional view showing the ozone generator shown in FIG.
  • FIG. 6 is an explanatory view showing a partial configuration of the ozone generator shown in FIG. 4
  • FIG. 7 is a sectional view showing a modification of the ozone generator shown in FIG.
  • FIG. 8 is a configuration diagram showing an ozone generator according to Embodiment 5 of the present invention.
  • FIG. 1 is a configuration diagram showing an ozone generator according to Embodiment 1 of the present invention.
  • This ozone generator 100 has a configuration in which an ultraviolet lamp 1 constituted by a vacuum-evacuated quartz glass tube and an ozone extraction tube 2 installed along the ultraviolet lamp 1 are installed in a small housing 3.
  • the ultraviolet lamp 1 is made of a low-alkaline permeable glass such as a low alkali borosilicate glass or a quartz glass, in which mercury vapor is sealed.
  • the ultraviolet lamp 1 is connected to a lighting inverter 5 via a power supply wiring cord 4.
  • the power supply 6 is connected to the lighting inverter 5.
  • the ozone extraction pipe 2 is made of a low-alkaline borosilicate glass or an ultraviolet transmitting glass such as quartz glass as described above, and an air compressor 8 is connected to one end of the ozone extraction pipe 2 through a blowing hose 7. ing.
  • An ozone blowing hose 9 is connected to the other end.
  • an ozone blowing pad 10 is attached to the ozone blowing hose 9 and is installed in the water tank 11.
  • the ozone water is provided in the water tank 11 to produce ozone water, but this is an example of the use of the present invention, and the ozone generation device can be applied to other than the production of ozone water.
  • ozone In generating ozone, first, a predetermined power is supplied to the ultraviolet lamp 1 to generate ultraviolet light. Subsequently, air is introduced into the ozone extraction pipe 2 by the air compressor 8. Then, the ultraviolet light is extracted from the ultraviolet lamp 1 and ozone. After passing through the pipe 2, ozone is generated in the ozone extraction pipe 2. The ozone in the ozone extracting pipe 2 is forcibly guided to an ozone blowing hose 9 by an air compressor 8 and discharged from the ozone blowing pad 10 into the water tank 11. Thereby, ozone can be dissolved in the water in the water tank 11.
  • the ozone is generated by installing the ozone extraction tube 2 along the ultraviolet lamp 1, so that the ozone generator can be configured with a simple structure. realizable. Also, the ozone generator can be made compact. It is preferable that the ozone extraction tube 2 is installed in contact with the ultraviolet lamp 1, but may be installed at some distance as long as the ultraviolet light can be transmitted efficiently. Also, a reflector may be provided around the ultraviolet lamp 1. By doing so, ozone generation efficiency can be improved.
  • FIG. 2 is a configuration diagram showing an ozone generation device according to Embodiment 2 of the present invention.
  • the ozone generator 200 has a configuration in which the inside of the small housing 21 is partitioned by a partition 22, and the ultraviolet lamp 1 is installed in one room 23.
  • the partition 22 is made of an ultraviolet transmitting glass such as low alkali borosilicate glass or quartz glass.
  • the ultraviolet lamp lighting inverter 5 and the power supply 6 are the same as those in the first embodiment, and therefore the description is omitted.
  • An air compressor 8 is connected to the upstream side of the other room 24 via a blower hose 7. Further, an ozone blowing hose 9 is connected to the downstream side, and an ozone blowing pad 10 is attached to the end thereof.
  • an ozone blowing hose 9 is connected to the downstream side, and an ozone blowing pad 10 is attached to the end thereof.
  • the ozone generator 200 can be manufactured simply and compactly. it can. Further, as described above, the use of the ozone generator 200 is not limited to the production of ozone water.
  • the air compressor-8 is not required for some applications.
  • FIG. 3 is a configuration diagram showing an ozone generator according to Embodiment 3 of the present invention.
  • This ozone generator 300 has a configuration in which an ozone extraction tube 31 has a double tube structure, and an ultraviolet lamp 1 is installed in an inner tube 32 thereof.
  • the ozone extraction tube 31 having the double-tube structure is made of a low-alkaline borosilicate glass or a quartz glass or other ultraviolet transparent glass as described above.
  • Lids 34 are provided at both ends of the outer tube 33 of the ozone extraction tube 31.
  • An air compressor 8 is connected to the upstream side of the outer pipe 33 via a blower hose 7. Further, an ozone blowing hose 9 is connected to the downstream side, and an ozone blowing pad 10 is attached to the end thereof.
  • ozone can be generated in the outer tube 33 by ultraviolet rays spreading from the ultraviolet lamp 1 in all directions, so that the ozone generator 300 can be configured compactly and easily, and ozone can be generated. Efficiency can be improved.
  • the hose 7 for blowing air and the hose 9 for blowing ozone may be branched and provided evenly on the lid 34.
  • FIG. 4 is a configuration diagram showing an ozone generator according to Embodiment 4 of the present invention.
  • FIG. 5 is a radial cross-sectional view showing the ozone generator shown in FIG.
  • the ozone generator 400 has a configuration in which a plurality of ozone extraction tubes 2 are arranged around an ultraviolet lamp 1.
  • the housing 41 is formed of a cylindrical outer tube 42 and an inner tube 43, and the ozone extraction tube 2 is accommodated between the outer tube 42 and the inner tube 43.
  • the inner tube 43 and the ozone extraction tube 2 are made of a low-alkaline borosilicate glass or other ultraviolet-transmissive glass, as described above.
  • the ultraviolet lamp 1 is provided in the inner tube 43.
  • a lighting inverter 5 and a power supply 6 are connected to the ultraviolet lamp 1.
  • a flange 44 is attached to an end of the housing 41. This one As shown in FIG. 6, a plurality of holes 45 into which the plurality of ozone extraction pipes 2 are fitted are provided on the inner surface of the flange 44. The center of each hole 45 is perforated, and the through holes 46 are assembled in the flange 44 and connected to the blower hose 7. An air compressor 8 is connected to the blower hose 7. Also, as shown in FIG. 6, a plurality of through holes 46 are provided in the other flange 44, which are assembled in the flange 4 and connected to the ozone blowing hose 9.
  • the ultraviolet light When ultraviolet light is emitted from the ultraviolet lamp 1, the ultraviolet light passes through the inner tube 43 and the ozone extraction tube 2, and ozone is generated in the ozone extraction tube 2. This ozone is forcibly exhausted by the air compressor 8. At this time, the compressed air as a raw material is supplied from the blower hose 7 into the ozone extraction pipe 2 through the plurality of through holes 46, and the ozone generated here is blown out through the plurality of through holes 46 on the opposite side. From the hose 9 for use. The discharged ozone is used for cleaning semiconductor wafers.
  • ozone can be generated by ultraviolet rays spreading in all directions, so that the ozone generator 400 can be compactly and simply configured, and the ozone generation efficiency can be improved. it can.
  • the number of the ozone extraction pipes 2 is not limited, and the number of the ozone extraction pipes 2 can be appropriately stored and used. This is particularly useful when adjusting the amount of ozone generated.
  • the cross-sectional shape of the ozone extraction pipe 2 is not limited to a circular shape. For example, as shown in FIG. 7, a fan-shaped cross section that can be installed between the outer pipe 42 and the inner pipe 43 of the housing 41 may be used (ozone extraction pipe 47). Furthermore, since the inner tube 43 is used, the shape of the ultraviolet lamp 1 can be used even if it is not a tubular shape.
  • FIG. 8 is a configuration diagram showing an ozone generator according to Embodiment 5 of the present invention.
  • This ozone generator 500 has a configuration in which an ultraviolet lamp 1 composed of a evacuated quartz glass tube and a plurality of ozone extraction tubes 2 installed around the ultraviolet lamp 1 are installed in a small housing 51. is there. UV lamp 1 and ozone
  • the configuration of the outlet pipe 2 is the same as that of the embodiment i, and the description is omitted.
  • the plurality of ozone extraction pipes 2 join at the upstream side and the downstream side to form a supply port and an exhaust port.
  • ozone can be generated by ultraviolet rays spreading in all directions, so that the ozone generator 500 can be configured compactly and simply, and the ozone generation efficiency can be improved.
  • the cross-sectional shape of the ozone extraction pipe 2 is not limited to the circular shape.
  • the ozone extracting pipe is provided along the ozone generating means, so that the apparatus can have a compact and simple configuration.
  • the ozone generator according to the present invention is used for production of ozone water, indoor deodorization, sterilization, etc., and is particularly applicable to a compact and easily configured ozone generator. is there.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

An ozone generating device, wherein an ultraviolet lamp (1) formed of an ultraviolet ray transmitting glass and an ozone retrevial tube (2) disposed along the ultraviolet lamp (1) and formed also of the ultraviolet ray transmitting glass are stored in a small housing (3), an air compressor (8) is connected to the ozone retrevial tube (2), ultraviolet ray generated from the ultraviolet lamp (1) leads into the ozone retrieval tube (2) and generates ozone in the air inside the tube, and the ozone is exhausted forcibly by the air compressor (8).

Description

明 細 オゾン発生装置 技術分野  Description Ozone generator Technical field
この発明は、 オゾン水の製造、 室内の脱臭、 殺菌などに用いられ、 特に、 コン パクトで簡単に構成することができるオゾン発生装置に関する。 背景技術  The present invention relates to an ozone generator which is used for producing ozone water, deodorizing indoors, sterilizing, and the like, and in particular, can be compactly and simply constructed. Background art
従来からオゾン発生方法として、 放電法、 紫外線照射法、 水電解法などが知ら れている。 このうち、 放電法は、 空気中に放電することにより窒素酸化物 (N O X ) が発生するため、 そのまま使用するのは好ましくない。 また、 水電解法によ るオゾン製造装置は、 サイズが大きいため携帯性が悪いという問題がある。 この ため、 従来から、 コンパクトに構成できて、 N O Xの発生しない紫外線照射法に よるオゾン発生器が実用化されている。 なお、 このような紫外線照射法を用いた オゾン発生装置としては、 特開平 2 0 0 0 - 8 4 0 6 0号公報などに記載された ものが知られている。 また、 一般的に原料を通過させるガラス管の外側から紫外 線を透過させるようにした構造のものも知られている。  Conventionally, as a method for generating ozone, a discharge method, an ultraviolet irradiation method, a water electrolysis method, and the like are known. Among them, the discharge method is not preferable to use as it is because nitrogen oxides (NOx) are generated by discharging into air. In addition, an ozone production apparatus using a water electrolysis method has a problem that portability is poor due to its large size. For this reason, an ozone generator using an ultraviolet irradiation method, which can be made compact and does not generate NO X, has been put to practical use. As an ozone generator using such an ultraviolet irradiation method, an ozone generator described in Japanese Patent Application Laid-Open No. 2000-84060 is known. In addition, a structure is generally known in which ultraviolet rays are transmitted from the outside of a glass tube through which raw materials pass.
上記のようなオゾン発生装置は、 たとえば自動車の車内を除菌、 消臭するため に用いたり、 冷蔵庫内の消臭に用いたりするようになつてきており、 このような ニーズに対応するためには、 コンパクトで簡単な構成であることが望まれる。 従って、 本発明は、 装置自体をコンパクトで簡単な構成にし得るオゾン発生装 置を提供することを目的としている。 発明の開示  Ozone generators such as those described above have been used, for example, to disinfect and deodorize the interior of automobiles and to deodorize in refrigerators. Is desired to be compact and simple. Therefore, an object of the present invention is to provide an ozone generating apparatus capable of making the apparatus itself compact and simple. Disclosure of the invention
上述の目的を達成するために、 本発明にかかるオゾン発生装置は、 原料ガスに 紫外線を照射することでォゾンを発生させるオゾン発生装置において、 紫外線ラ ンプその他の紫外線発生装置を含んで構成したオゾン発生手段と、 オゾン発生手 段に沿って設けた紫外線透過ガラス管から構成され、 その一端側から原料ガスを 供給し他端側から内部で発生したォゾンを取り出すォゾン取出管とを備えたもの である。 In order to achieve the above object, an ozone generator according to the present invention is an ozone generator that generates ozone by irradiating a raw material gas with ultraviolet light. Pumps and other ultraviolet generating devices, and an ultraviolet transmitting glass tube provided along the ozone generating means. The raw material gas is supplied from one end and generated inside from the other end. It is equipped with an ozone take-out tube for taking out ozone.
また、 本発明にかかるオゾン発生装置は、 上記オゾン発生装置において、 さら に前記オゾン発生手段の周囲に複数の前記オゾン取出管を設けたものである。 また、 本発明にかかるオゾン発生装置は、 上記オゾン発生装置において、 さら に、 内管と外管とから構成した二重管の前記内管の中に前記オゾン発生手段を設 置し、 内管と外管との空間を前記オゾン取出管として機能させるようにしたもの である。  Further, the ozone generator according to the present invention is the above-mentioned ozone generator, further comprising a plurality of the ozone outlet pipes provided around the ozone generator. Further, the ozone generator according to the present invention is the ozone generator described above, further comprising: installing the ozone generating means in the inner tube of a double tube including an inner tube and an outer tube; And a space between the outer tube and the outer tube functions as the ozone extracting tube.
また、 本発明にかかるオゾン発生装置は、 上記オゾン発生装置において、 さら に、 内管と外管とから構成した二重管の前記内管の中に前記ォゾン発生手段を設 置し、 内管と外管との間に前記ォゾン取出管を複数配置したものである。  Further, the ozone generator according to the present invention is the above-mentioned ozone generator, further comprising: installing the ozone generating means in the inner tube of a double tube including an inner tube and an outer tube; And a plurality of the ozone take-out tubes arranged between the outer tube and the outer tube.
また、 本発明にかかるオゾン発生装置は、 上記オゾン発生装置において、 前記 オゾン発生手段をハウジング内に収容すると共に前記オゾン取出管をハウジング を貫通させるように設けたものである。  In the ozone generator according to the present invention, in the ozone generator described above, the ozone generator is accommodated in a housing, and the ozone outlet tube is provided so as to penetrate the housing.
また、 本発明にかかるオゾン発生装置は、 原料ガスに紫外線を照射することで オゾンを発生させるオゾン発生装置において、 紫外線ランプその他の紫外線発生 装置を含んで構成したオゾン発生手段と、 ォゾン発生手段を収容するハウジング とを備え、 ハウジング内を紫外線透過ガラスによって間仕切り、 一方の室内にォ ゾン発生手段を配置し、 他方の室内の一端側から原料ガスを供給し他端側から内 部で発生したオゾンを取り出すようにしたものである。 図面の簡単な説明  Further, an ozone generator according to the present invention is an ozone generator that generates ozone by irradiating a raw material gas with ultraviolet light, wherein the ozone generator includes an ultraviolet lamp and another ultraviolet generator, and an ozone generator. A housing for accommodating therein, the inside of the housing is partitioned by ultraviolet transmitting glass, an ozone generating means is arranged in one room, the source gas is supplied from one end of the other room, and the ozone generated internally from the other end Is taken out. BRIEF DESCRIPTION OF THE FIGURES
第 1図は、 この発明の実施の形態 1にかかるオゾン発生装置を示す構成図であ り、 第 2図は、 この発明の実施の形態 2にかかるオゾン発生装置を示す構成図で あり、 第 3図は、 この発明の実施の形態 3にかかるオゾン発生装置を示す構成図 であり、 第 4図は、 この発明の実施の形態 4にかかるオゾン発生装置を示す構成 図であり、 第 5図は、 第 4図に示したオゾン発生装置を示す径方向断面図であり 、 第 6図は、 第 4図に示したオゾン発生装置の一部構成を示す説明図であり、 第 7図は、 第 4図に示したオゾン発生装置の変形例を示す断面図であり、 第 8図は 、 この発明の実施の形態 5にかかるオゾン発生装置を示す構成図である。 発明を実施するための最良の形態 FIG. 1 is a configuration diagram illustrating an ozone generation device according to a first embodiment of the present invention. FIG. 2 is a configuration diagram illustrating an ozone generation device according to a second embodiment of the present invention. FIG. 3 is a configuration diagram showing an ozone generator according to Embodiment 3 of the present invention. FIG. 4 is a configuration diagram showing an ozone generator according to Embodiment 4 of the present invention. FIG. 5 is a radial cross-sectional view showing the ozone generator shown in FIG. FIG. 6 is an explanatory view showing a partial configuration of the ozone generator shown in FIG. 4, and FIG. 7 is a sectional view showing a modification of the ozone generator shown in FIG. FIG. 8 is a configuration diagram showing an ozone generator according to Embodiment 5 of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION
以下、 この発明にかかるオゾン発生装置につき図面を参照しつつ詳細に説明す る。 なお、 この実施の形態によりこの発明が限定されるものではない。  Hereinafter, an ozone generator according to the present invention will be described in detail with reference to the drawings. The present invention is not limited by the embodiment.
第 1図は、 この発明の実施の形態 1にかかるオゾン発生装置を示す構成図であ る。 このオゾン発生装置 1 0 0は、 真空引きした石英ガラス管によって構成した 紫外線ランプ 1 と、 この紫外線ランプ 1に沿って設置したオゾン取出管 2とを小 型ハウジング 3内に設置した構成である。 紫外線ランプ 1は、 低アルカリの硼珪 酸ガラス或いは石英ガラス等の紫外線透過ガラスによって構成され、 その中には 水銀蒸気が封入されている。 紫外線ランプ 1には、 給電用の配線コード 4を介し て点灯インバー夕一 5が接続されている。 点灯インバーター 5には、 電源 6が接 続されている。 また、 前記オゾン取出管 2は、 上記同様に低アルカリの硼珪酸ガ ラス或いは石英ガラス等の紫外線透過ガラスによって構成され、 その一端側には 、 送風用ホース 7を介してエアコンプレッサー 8が接続されている。  FIG. 1 is a configuration diagram showing an ozone generator according to Embodiment 1 of the present invention. This ozone generator 100 has a configuration in which an ultraviolet lamp 1 constituted by a vacuum-evacuated quartz glass tube and an ozone extraction tube 2 installed along the ultraviolet lamp 1 are installed in a small housing 3. The ultraviolet lamp 1 is made of a low-alkaline permeable glass such as a low alkali borosilicate glass or a quartz glass, in which mercury vapor is sealed. The ultraviolet lamp 1 is connected to a lighting inverter 5 via a power supply wiring cord 4. The power supply 6 is connected to the lighting inverter 5. The ozone extraction pipe 2 is made of a low-alkaline borosilicate glass or an ultraviolet transmitting glass such as quartz glass as described above, and an air compressor 8 is connected to one end of the ozone extraction pipe 2 through a blowing hose 7. ing.
また、 他端側には、 オゾン吹き出し用ホース 9が接続されている。 このオゾン 吹き出し用ホース 9には、 たとえばオゾン吹き出しパッ ド 1 0が取りつけられ、 水槽 1 1内に設置されている。 但し、 水槽 1 1内に設置したのはオゾン水を作る ためであるが、 これは本発明の用途の一例であつてォゾン水の製造以外にも当該 ォゾン発生装置を適用することができる。  An ozone blowing hose 9 is connected to the other end. For example, an ozone blowing pad 10 is attached to the ozone blowing hose 9 and is installed in the water tank 11. However, the ozone water is provided in the water tank 11 to produce ozone water, but this is an example of the use of the present invention, and the ozone generation device can be applied to other than the production of ozone water.
オゾンを発生させるにあたっては、 まず、 紫外線ランプ 1に所定の電力を供給 して、 紫外光を発生させる。 続いて、 前記エアコンプレッサー 8によりオゾン取 出管 2内に空気を導入する。 すると、 紫外光が紫外線ランプ 1およびオゾン取出 管 2を透過して、 当該オゾン取出管 2にてオゾンが発生する。 このオゾン取出管 2内のオゾンは、 エアコンプレッサー 8により強制的にオゾン吹き出し用ホース 9に導かれ、 オゾン吹き出しパッ ド 1 0から水槽 1 1中に放出される。 これによ り水槽 1 1中の水にォゾンを溶解することができる。 In generating ozone, first, a predetermined power is supplied to the ultraviolet lamp 1 to generate ultraviolet light. Subsequently, air is introduced into the ozone extraction pipe 2 by the air compressor 8. Then, the ultraviolet light is extracted from the ultraviolet lamp 1 and ozone. After passing through the pipe 2, ozone is generated in the ozone extraction pipe 2. The ozone in the ozone extracting pipe 2 is forcibly guided to an ozone blowing hose 9 by an air compressor 8 and discharged from the ozone blowing pad 10 into the water tank 11. Thereby, ozone can be dissolved in the water in the water tank 11.
以上、 この実施の形態 1にかかるオゾン発生装置 1 0 0では、 紫外線ランプ 1 に沿つてオゾン取出管 2を設置することでォゾンを発生させるようにしているか ら、 簡単な構造によってオゾン発生装置を実現できる。 また、 オゾン発生装置を コンパクトにまとめることができる。 なお、 オゾン取出管 2は、 紫外線ランプ 1 に接触させて設置するのが好ましいが、 紫外線が効率的に透過する程度であれば 多少離れて設置してもよい。 また、 紫外線ランプ 1の周囲に反射板を設置するよ うにしてもよレ、。 このようにすれば、 オゾン発生効率を向上させることができる 第 2図は、 この発明の実施の形態 2にかかるオゾン発生装置を示す構成図であ る。 このオゾン発生装置 2 0 0では、 小型ハウジング 2 1内を間仕切り 2 2によ つて仕切り、 一方の室内 2 3に紫外線ランプ 1を設置した構成である。 間仕切り 2 2は、 低アルカリの硼珪酸ガラス或いは石英ガラス等の紫外線透過ガラスによ つて構成する。 紫外線ランプし 点灯インバーター 5および電源 6は、 上記実施 の形態 1のものと同様であるから説明を省略する。  As described above, in the ozone generator 100 according to the first embodiment, the ozone is generated by installing the ozone extraction tube 2 along the ultraviolet lamp 1, so that the ozone generator can be configured with a simple structure. realizable. Also, the ozone generator can be made compact. It is preferable that the ozone extraction tube 2 is installed in contact with the ultraviolet lamp 1, but may be installed at some distance as long as the ultraviolet light can be transmitted efficiently. Also, a reflector may be provided around the ultraviolet lamp 1. By doing so, ozone generation efficiency can be improved. FIG. 2 is a configuration diagram showing an ozone generation device according to Embodiment 2 of the present invention. The ozone generator 200 has a configuration in which the inside of the small housing 21 is partitioned by a partition 22, and the ultraviolet lamp 1 is installed in one room 23. The partition 22 is made of an ultraviolet transmitting glass such as low alkali borosilicate glass or quartz glass. The ultraviolet lamp lighting inverter 5 and the power supply 6 are the same as those in the first embodiment, and therefore the description is omitted.
他方の室内 2 4の上流側には、 送風用ホース 7を介してエアコンプレッサー 8 が接続されている。 また、 その下流側にはオゾン吹き出し用ホース 9が接続され 、 その先端にはオゾン吹き出しパッ ド 1 0が取りつけられている。 上記同様、 他 方の室内 2 3に設けた紫外線ランプ 1から紫外線を発生させると、 間仕切り 2 2 を通過し、 一方の室内 2 4でオゾンが発生する。 室内 2 4に発生したオゾンは、 エアコンプレッサー 8により強制的にオゾン吹き出し用ホース 9に導かれ、 ォゾ ン吹き出しパッ ド 1 0から水槽 1 1中に放出される。 これにより水槽 1 1中の水 iこォゾンを溶解することができる。  An air compressor 8 is connected to the upstream side of the other room 24 via a blower hose 7. Further, an ozone blowing hose 9 is connected to the downstream side, and an ozone blowing pad 10 is attached to the end thereof. As described above, when ultraviolet rays are generated from the ultraviolet lamp 1 provided in the other room 23, the ultraviolet light passes through the partition 22 and ozone is generated in one room 24. The ozone generated in the room 24 is forcibly guided to the ozone blowing hose 9 by the air compressor 8 and discharged into the water tank 11 from the ozone blowing pad 10. As a result, the water in the water tank 11 can be dissolved.
上記のような構成にしても、 オゾン発生装置 2 0 0をコンパク卜で簡単に製造 できる。 また、 このオゾン発生装置 2 0 0の用途がオゾン水の製造に限定されな いのは、 上記説明の通りである。 また、 用途によっては、 上記エアコンプレッサ ― 8は不要である。 Even with the above configuration, the ozone generator 200 can be manufactured simply and compactly. it can. Further, as described above, the use of the ozone generator 200 is not limited to the production of ozone water. The air compressor-8 is not required for some applications.
第 3図は、 この発明の実施の形態 3にかかるオゾン発生装置を示す構成図であ る。 このオゾン発生装置 3 0 0は、 オゾン取出管 3 1を二重管構造にして、 その 内管 3 2に紫外線ランプ 1を設置した構成である。 当該二重管構造のオゾン取出 管 3 1は、 上記同様、 低アルカリの硼珪酸ガラス或いは石英ガラス等の紫外線透 過ガラスによって構成する。 当該オゾン取出管 3 1の外管 3 3の両端には、 それ ぞれ蓋 3 4が設けられている。 また、 外管 3 3の上流側には、 送風用ホース 7を 介してエアコンプレッサー 8が接続されている。 また、 その下流側には、 オゾン 吹き出し用ホース 9が接続され、 その先端にオゾン吹き出しパッ ド 1 0が取りつ けられている。  FIG. 3 is a configuration diagram showing an ozone generator according to Embodiment 3 of the present invention. This ozone generator 300 has a configuration in which an ozone extraction tube 31 has a double tube structure, and an ultraviolet lamp 1 is installed in an inner tube 32 thereof. The ozone extraction tube 31 having the double-tube structure is made of a low-alkaline borosilicate glass or a quartz glass or other ultraviolet transparent glass as described above. Lids 34 are provided at both ends of the outer tube 33 of the ozone extraction tube 31. An air compressor 8 is connected to the upstream side of the outer pipe 33 via a blower hose 7. Further, an ozone blowing hose 9 is connected to the downstream side, and an ozone blowing pad 10 is attached to the end thereof.
上記のような構成にすれば、 紫外線ランプ 1から四方に広がる紫外線により外 管 3 3内にオゾンを発生させることができるから、 オゾン発生装置 3 0 0をコン パクトかつ簡単に構成できると共にオゾン発生効率を向上させることができる。 なお、 送風用ホース 7およびオゾン吹き出し用ホース 9を分岐して、 蓋 3 4に対 して均等に設けるようにしてもよい。  With the above-described configuration, ozone can be generated in the outer tube 33 by ultraviolet rays spreading from the ultraviolet lamp 1 in all directions, so that the ozone generator 300 can be configured compactly and easily, and ozone can be generated. Efficiency can be improved. The hose 7 for blowing air and the hose 9 for blowing ozone may be branched and provided evenly on the lid 34.
第 4図は、 この発明の実施の形態 4にかかるオゾン発生装置を示す構成図であ る。 第 5図は、 第 4図に示したオゾン発生装置を示す径方向断面図である。 この オゾン発生装置 4 0 0は、 紫外線ランプ 1の周囲に複数のオゾン取出管 2を配置 した構成である。 ハウジング 4 1は円筒形状の外管 4 2と内管 4 3から形成され ており、 オゾン取出管 2は前記外管 4 2と内管 4 3との間に収容されている。 内 管 4 3およびオゾン取出管 2は、 上記同様、 低アルカリの硼珪酸ガラス等の紫外 線透過ガラスにより構成する。 また、 内管 4 3には、 紫外線ランプ 1が内設され ている。 紫外線ランプ 1には、 点灯インバーター 5および電源 6が接続されてい 。  FIG. 4 is a configuration diagram showing an ozone generator according to Embodiment 4 of the present invention. FIG. 5 is a radial cross-sectional view showing the ozone generator shown in FIG. The ozone generator 400 has a configuration in which a plurality of ozone extraction tubes 2 are arranged around an ultraviolet lamp 1. The housing 41 is formed of a cylindrical outer tube 42 and an inner tube 43, and the ozone extraction tube 2 is accommodated between the outer tube 42 and the inner tube 43. The inner tube 43 and the ozone extraction tube 2 are made of a low-alkaline borosilicate glass or other ultraviolet-transmissive glass, as described above. The ultraviolet lamp 1 is provided in the inner tube 43. A lighting inverter 5 and a power supply 6 are connected to the ultraviolet lamp 1.
前記ハウジング 4 1の端部には、 フランジ 4 4が取り付けられている。 このつ ランジ 4 4の内側面には、 第 6図に示すように、 前記複数のオゾン取出管 2を嵌 め込む複数の穴部 4 5が設けられている。 各穴部 4 5の中心は穿孔されており、 この通し孔 4 6がフランジ 4 4内で集合して送風用ホース 7に接続されている。 送風用ホース 7には、 エアコンプレッサー 8が接綜されている。 また、 他方側の フランジ 4 4においても、 第 6図に示すように、 複数の通し孔 4 6が設けられ、 これらがフランジ 4 内で集合してオゾン吹き出し用ホース 9に接続されている o A flange 44 is attached to an end of the housing 41. This one As shown in FIG. 6, a plurality of holes 45 into which the plurality of ozone extraction pipes 2 are fitted are provided on the inner surface of the flange 44. The center of each hole 45 is perforated, and the through holes 46 are assembled in the flange 44 and connected to the blower hose 7. An air compressor 8 is connected to the blower hose 7. Also, as shown in FIG. 6, a plurality of through holes 46 are provided in the other flange 44, which are assembled in the flange 4 and connected to the ozone blowing hose 9.
紫外線ランプ 1により紫外線を発光すると、 紫外線が内管 4 3およびオゾン取 出管 2を通過して当該オゾン取出管 2内でオゾンが発生する。 このオゾンは、 ェ ァコンプレッサー 8により強制的に排気される。 このとき、 原料となる圧縮空気 は、 送風用ホース 7から複数の通し孔 4 6を通じてオゾン取出管 2内に供給され 、 ここで生成したオゾンは、 反対側の複数の通し孔 4 6を通じてオゾン吹き出し 用ホース 9から排出される。 排出されたオゾンは、 半導体ウェハの洗浄などに用 いられる。  When ultraviolet light is emitted from the ultraviolet lamp 1, the ultraviolet light passes through the inner tube 43 and the ozone extraction tube 2, and ozone is generated in the ozone extraction tube 2. This ozone is forcibly exhausted by the air compressor 8. At this time, the compressed air as a raw material is supplied from the blower hose 7 into the ozone extraction pipe 2 through the plurality of through holes 46, and the ozone generated here is blown out through the plurality of through holes 46 on the opposite side. From the hose 9 for use. The discharged ozone is used for cleaning semiconductor wafers.
上記のような構成にすれば、 四方に広がる紫外線によりオゾンを発生させるこ とができるから、 オゾン発生装置 4 0 0をコンパク トかつ簡単に構成できると共 に、 オゾン発生効率を向上させることができる。 なお、 前記オゾン取出管 2の本 数は限定されず、 適宜必要な本数分収容して用いることができる。 特にオゾン発 生量を調整するようなときに有用である。 また、 オゾン取出管 2の断面形状は、 円形状に限定されない。 たとえば、 第 7図に示すように、 ハウジング 4 1の外管 4 2と内管 4 3との間に設置できるような断面が扇形状のものを用いてもよい （ オゾン取出管 4 7 ) 。 さらに、 内管 4 3を用いているため、 紫外線ランプ 1の形 状は、 管状のもの以外であっても使用可能である。  With the above-described configuration, ozone can be generated by ultraviolet rays spreading in all directions, so that the ozone generator 400 can be compactly and simply configured, and the ozone generation efficiency can be improved. it can. The number of the ozone extraction pipes 2 is not limited, and the number of the ozone extraction pipes 2 can be appropriately stored and used. This is particularly useful when adjusting the amount of ozone generated. Further, the cross-sectional shape of the ozone extraction pipe 2 is not limited to a circular shape. For example, as shown in FIG. 7, a fan-shaped cross section that can be installed between the outer pipe 42 and the inner pipe 43 of the housing 41 may be used (ozone extraction pipe 47). Furthermore, since the inner tube 43 is used, the shape of the ultraviolet lamp 1 can be used even if it is not a tubular shape.
第 8図は、 この発明の実施の形態 5にかかるオゾン発生装置を示す構成図であ る。 このオゾン発生装置 5 0 0は、 真空引きした石英ガラス管によって構成した 紫外線ランプ 1 と、 この紫外線ランプ 1の周囲に設置した複数のオゾン取出管 2 とを小型ハウジング 5 1内に設置した構成である。 紫外線ランプ 1およびオゾン 取出管 2の構成は、 実施の形態 i と同じであるから説明を省略する。 この複数の ォゾン取出管 2は、 上流側および下流側におし、て合流して供給口および排気口を 形成する。 FIG. 8 is a configuration diagram showing an ozone generator according to Embodiment 5 of the present invention. This ozone generator 500 has a configuration in which an ultraviolet lamp 1 composed of a evacuated quartz glass tube and a plurality of ozone extraction tubes 2 installed around the ultraviolet lamp 1 are installed in a small housing 51. is there. UV lamp 1 and ozone The configuration of the outlet pipe 2 is the same as that of the embodiment i, and the description is omitted. The plurality of ozone extraction pipes 2 join at the upstream side and the downstream side to form a supply port and an exhaust port.
このような構成にしても、 四方に広がる紫外線によりオゾンを発生させること ができるから、 オゾン発生装置 5 0 0をコンパク トかつ簡単に構成できると共に オゾン発生効率を向上させることができる。 また、 オゾン取出管 2の断面形状が 円形状に限定されないのは、 上記の通りである。  Even with such a configuration, ozone can be generated by ultraviolet rays spreading in all directions, so that the ozone generator 500 can be configured compactly and simply, and the ozone generation efficiency can be improved. Further, as described above, the cross-sectional shape of the ozone extraction pipe 2 is not limited to the circular shape.
以上説明したように、 この発明のオゾン発生装置では、 オゾン発生手段に沿つ てオゾン取出管を設けたので、 装置をコンパクトかつ簡単な構成とすることがで きる。 産業上の利用可能性  As described above, in the ozone generating apparatus of the present invention, the ozone extracting pipe is provided along the ozone generating means, so that the apparatus can have a compact and simple configuration. Industrial applicability
以上のように、 本発明にかかるオゾン発生装置は、 オゾン水の製造、 室内の脱 臭、 殺菌などに用いられ、 特に、 コンパクトで簡単に構成することができるォゾ ン発生装置に利用可能である。  As described above, the ozone generator according to the present invention is used for production of ozone water, indoor deodorization, sterilization, etc., and is particularly applicable to a compact and easily configured ozone generator. is there.

Claims

請 求 の 範 囲 The scope of the claims
1 . 原料ガスに紫外線を照射することでォゾンを発生させるオゾン発生装置にお いて、 1. In an ozone generator that generates ozone by irradiating raw material gas with ultraviolet light,
紫外線ランプその他の紫外線発生装置を含んで構成したオゾン発生手段と、 オゾン発生手段に沿って設けた紫外線透過ガラス管から構成され、 その一端側 から原料ガスを供給し他端側から内部で発生したオゾンを取り出すォゾン取出管 と、  It is composed of an ozone generating means including an ultraviolet lamp and other ultraviolet generating devices, and an ultraviolet transmitting glass tube provided along the ozone generating means. The raw material gas is supplied from one end and generated inside from the other end. Ozone extraction tube for extracting ozone,
を備えたことを特徴とするオゾン発生装置。  An ozone generator characterized by comprising:
2 . さらに、 前記オゾン発生手段の周囲に複数の前記オゾン取出管を設けたこと を特徴とする請求項 1に記載のオゾン発生装置。 2. The ozone generator according to claim 1, further comprising a plurality of the ozone extraction pipes provided around the ozone generation means.
3 . さらに、 内管と外管とから構成した二重管の前記内管の中に前記オゾン発生 手段を設置し、 内管と外管との空間を前記オゾン取出管として機能させるように したことを特徴とする請求項 1に記載のオゾン発生装置。 3. Further, the ozone generating means is installed in the inner tube of the double tube composed of the inner tube and the outer tube, so that the space between the inner tube and the outer tube functions as the ozone extracting tube. 2. The ozone generator according to claim 1, wherein:
4 . さらに、 内管と外管とから構成した二重管の前記内管の中に前記オゾン発生 手段を設置し、 内管と外管との間に前記オゾン取出管を複数配置したことを特徴 とする請求項 1に記載のオゾン発生装置。 4. Further, the ozone generating means is installed in the inner tube of the double tube composed of the inner tube and the outer tube, and a plurality of the ozone extraction tubes are arranged between the inner tube and the outer tube. The ozone generator according to claim 1, wherein:
5 . 前記オゾン発生手段をハウジング内に収容すると共に前記オゾン取出管をハ ゥジングを貫通させるように設けたことを特徴とする請求項 1〜 4のいずれか一 つに記載のオゾン発生装置。 5. The ozone generator according to any one of claims 1 to 4, wherein the ozone generation means is housed in a housing and the ozone extraction pipe is provided so as to penetrate the housing.
6 . 原料ガスに紫外線を照射することでオゾンを発生させるオゾン発生装置にお いて、 紫外線ランプその他の紫外線発生装置を含んで構成したオゾン発生手段と、 ォ ゾン発生手段を収容するハウジングとを備え、 6. In an ozone generator that generates ozone by irradiating raw material gas with ultraviolet light, An ozone generating means including an ultraviolet lamp and other ultraviolet generating devices, and a housing accommodating the ozone generating means,
ハウジング内を紫外線透過ガラスによって間仕切り、 一方の室内にオゾン発生 手段を配置し、 他方の室内の一端側から原料ガスを供給し他端側から内部で発生 したオゾンを取り出すようにしたことを特徴とするオゾン発生装置。  The interior of the housing is partitioned by ultraviolet transmitting glass, an ozone generating means is arranged in one room, a source gas is supplied from one end of the other room, and ozone generated inside is extracted from the other end. Ozone generator.
PCT/JP2000/004415 1999-07-02 2000-07-03 Ozone generating device WO2001002292A1 (en)

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JP11222867A JP2001017845A (en) 1999-07-02 1999-07-02 Ozone extraction method by ozone absorbing pipe and small-sized ozone water producing device therefor
JP11/222867 1999-07-02
JP11/225613 1999-07-06
JP11225613A JP2001017985A (en) 1999-07-06 1999-07-06 Ozone extracting method by ozone absorption pipe (ozone generating and feeding pipe or plate) and production of ozone water by this method
JP11/241962 1999-07-27
JP11241962A JP2001039703A (en) 1999-07-27 1999-07-27 Method for extracting ozone with ozone absorber

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US4504445A (en) * 1982-09-03 1985-03-12 Alfred Walz Method and apparatus for generating ultraviolet radiation and ozone
JPS6250794U (en) * 1985-09-14 1987-03-30

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