JPS56125207A - Ozonizer - Google Patents

Ozonizer

Info

Publication number
JPS56125207A
JPS56125207A JP2674480A JP2674480A JPS56125207A JP S56125207 A JPS56125207 A JP S56125207A JP 2674480 A JP2674480 A JP 2674480A JP 2674480 A JP2674480 A JP 2674480A JP S56125207 A JPS56125207 A JP S56125207A
Authority
JP
Japan
Prior art keywords
tube
wavelength
ultraviolet light
ozone
discharge tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2674480A
Other languages
Japanese (ja)
Inventor
Hiroshi Nakanishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2674480A priority Critical patent/JPS56125207A/en
Publication of JPS56125207A publication Critical patent/JPS56125207A/en
Pending legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PURPOSE: To improve the emission efficiency of ozone, by the presence of a specific substance layer provided between a low-pressure mercury discharge tube and an ozone generating tube.
CONSTITUTION: The outer periphery of a low-pressure mercury discharge tube 1 is covered with a filter tube 4 constituted of good quartz glass coaxially, and then the outer periphery of the tube 4 is covered with an ozone generating tube 7 coaxially. A substance which absorbs ultraviolet light of wavelength about 253.7nm strongly and transmits ultraviolet light of wavelength about 184.9nm, e.g. hexafluoroacetylacetone, is introduced from an introductory port 5 via a valve 6 into the tube 4. A voltage is then applied from an electric power source 2 across electrodes 3 in the discharge tube 1, and air or oxygen introduced from an introductory port 8 into the generating tube 7 is irradiated with only ultraviolet light of wavelength about 184.9nm to generate ozone, which is expelled from an outlet port 9.
COPYRIGHT: (C)1981,JPO&Japio
JP2674480A 1980-03-05 1980-03-05 Ozonizer Pending JPS56125207A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2674480A JPS56125207A (en) 1980-03-05 1980-03-05 Ozonizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2674480A JPS56125207A (en) 1980-03-05 1980-03-05 Ozonizer

Publications (1)

Publication Number Publication Date
JPS56125207A true JPS56125207A (en) 1981-10-01

Family

ID=12201802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2674480A Pending JPS56125207A (en) 1980-03-05 1980-03-05 Ozonizer

Country Status (1)

Country Link
JP (1) JPS56125207A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5987821A (en) * 1982-11-11 1984-05-21 Seiko Epson Corp Oxidization
JPS59201438A (en) * 1983-04-28 1984-11-15 Toshiba Corp Wafer transfer apparatus
JPS6227643U (en) * 1985-07-31 1987-02-19
JPH02111604A (en) * 1988-10-20 1990-04-24 Showa Netsugaku Kogyo Kk Production of ozone
EP0464703A2 (en) * 1990-06-28 1992-01-08 Ebara Corporation Filter for a low-pressure mercury vapor lamp
EP0482021A1 (en) * 1989-06-29 1992-04-29 Arthurson Corp Pty Ltd Ozone generator.
US5223105A (en) * 1989-06-29 1993-06-29 Arthurson Corporation Pty. Ltd. Ozone generator
WO2001002292A1 (en) * 1999-07-02 2001-01-11 Toshinori Kuroda Ozone generating device
JP2009057279A (en) * 2008-11-10 2009-03-19 Toshiba Corp Ozone generator

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5987821A (en) * 1982-11-11 1984-05-21 Seiko Epson Corp Oxidization
JPS59201438A (en) * 1983-04-28 1984-11-15 Toshiba Corp Wafer transfer apparatus
JPS6227643U (en) * 1985-07-31 1987-02-19
JPH02111604A (en) * 1988-10-20 1990-04-24 Showa Netsugaku Kogyo Kk Production of ozone
EP0482021A1 (en) * 1989-06-29 1992-04-29 Arthurson Corp Pty Ltd Ozone generator.
US5223105A (en) * 1989-06-29 1993-06-29 Arthurson Corporation Pty. Ltd. Ozone generator
EP0464703A2 (en) * 1990-06-28 1992-01-08 Ebara Corporation Filter for a low-pressure mercury vapor lamp
WO2001002292A1 (en) * 1999-07-02 2001-01-11 Toshinori Kuroda Ozone generating device
JP2009057279A (en) * 2008-11-10 2009-03-19 Toshiba Corp Ozone generator

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