JPS57136385A - Manufacture of semiconductor laser - Google Patents
Manufacture of semiconductor laserInfo
- Publication number
- JPS57136385A JPS57136385A JP2165781A JP2165781A JPS57136385A JP S57136385 A JPS57136385 A JP S57136385A JP 2165781 A JP2165781 A JP 2165781A JP 2165781 A JP2165781 A JP 2165781A JP S57136385 A JPS57136385 A JP S57136385A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- substrate
- polycrystalline
- mesa stripe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 2
- 239000013078 crystal Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
- H01S5/2272—Buried mesa structure ; Striped active layer grown by a mask induced selective growth
Landscapes
- Semiconductor Lasers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2165781A JPS57136385A (en) | 1981-02-16 | 1981-02-16 | Manufacture of semiconductor laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2165781A JPS57136385A (en) | 1981-02-16 | 1981-02-16 | Manufacture of semiconductor laser |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57136385A true JPS57136385A (en) | 1982-08-23 |
JPH0370391B2 JPH0370391B2 (enrdf_load_stackoverflow) | 1991-11-07 |
Family
ID=12061112
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2165781A Granted JPS57136385A (en) | 1981-02-16 | 1981-02-16 | Manufacture of semiconductor laser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57136385A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6031287A (ja) * | 1983-07-29 | 1985-02-18 | Matsushita Electric Ind Co Ltd | 半導体レ−ザ装置 |
EP1835575A1 (de) | 2006-03-17 | 2007-09-19 | Humboldt-Universität zu Berlin | Halbleiterlaser und Verfahren zu seiner Herstellung |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51151090A (en) * | 1975-06-20 | 1976-12-25 | Matsushita Electric Ind Co Ltd | Semiconductor laser apparatus and its manufacturing method |
JPS556830A (en) * | 1978-06-29 | 1980-01-18 | Fujitsu Ltd | Semiconductor luminous apparatus |
-
1981
- 1981-02-16 JP JP2165781A patent/JPS57136385A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51151090A (en) * | 1975-06-20 | 1976-12-25 | Matsushita Electric Ind Co Ltd | Semiconductor laser apparatus and its manufacturing method |
JPS556830A (en) * | 1978-06-29 | 1980-01-18 | Fujitsu Ltd | Semiconductor luminous apparatus |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6031287A (ja) * | 1983-07-29 | 1985-02-18 | Matsushita Electric Ind Co Ltd | 半導体レ−ザ装置 |
EP1835575A1 (de) | 2006-03-17 | 2007-09-19 | Humboldt-Universität zu Berlin | Halbleiterlaser und Verfahren zu seiner Herstellung |
Also Published As
Publication number | Publication date |
---|---|
JPH0370391B2 (enrdf_load_stackoverflow) | 1991-11-07 |
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