JPS57123826A - Method for forming oxide thin film pattern - Google Patents
Method for forming oxide thin film patternInfo
- Publication number
- JPS57123826A JPS57123826A JP56009569A JP956981A JPS57123826A JP S57123826 A JPS57123826 A JP S57123826A JP 56009569 A JP56009569 A JP 56009569A JP 956981 A JP956981 A JP 956981A JP S57123826 A JPS57123826 A JP S57123826A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- oxide thin
- volume ratio
- solution
- hcl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 6
- 239000000243 solution Substances 0.000 abstract 5
- 238000005530 etching Methods 0.000 abstract 2
- 239000007864 aqueous solution Substances 0.000 abstract 1
- 239000002198 insoluble material Substances 0.000 abstract 1
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56009569A JPS57123826A (en) | 1981-01-27 | 1981-01-27 | Method for forming oxide thin film pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56009569A JPS57123826A (en) | 1981-01-27 | 1981-01-27 | Method for forming oxide thin film pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57123826A true JPS57123826A (en) | 1982-08-02 |
JPS6317773B2 JPS6317773B2 (enrdf_load_stackoverflow) | 1988-04-15 |
Family
ID=11723923
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56009569A Granted JPS57123826A (en) | 1981-01-27 | 1981-01-27 | Method for forming oxide thin film pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57123826A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5947783A (ja) * | 1982-09-10 | 1984-03-17 | Nippon Telegr & Teleph Corp <Ntt> | 酸化物超伝導体パタ−ン形成法 |
US5646095A (en) * | 1991-06-18 | 1997-07-08 | International Business Machines Corporation | Selective insulation etching for fabricating superconductor microcircuits |
US8246847B2 (en) * | 2005-09-12 | 2012-08-21 | Nippon Sheet Glass Company, Limited | Separating method for conductive ceramics sintered body |
US8409401B2 (en) | 2005-09-12 | 2013-04-02 | Nippon Sheet Glass Co., Ltd. | Separating method for dark ceramics sintered body |
-
1981
- 1981-01-27 JP JP56009569A patent/JPS57123826A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5947783A (ja) * | 1982-09-10 | 1984-03-17 | Nippon Telegr & Teleph Corp <Ntt> | 酸化物超伝導体パタ−ン形成法 |
US5646095A (en) * | 1991-06-18 | 1997-07-08 | International Business Machines Corporation | Selective insulation etching for fabricating superconductor microcircuits |
US8246847B2 (en) * | 2005-09-12 | 2012-08-21 | Nippon Sheet Glass Company, Limited | Separating method for conductive ceramics sintered body |
US8409401B2 (en) | 2005-09-12 | 2013-04-02 | Nippon Sheet Glass Co., Ltd. | Separating method for dark ceramics sintered body |
Also Published As
Publication number | Publication date |
---|---|
JPS6317773B2 (enrdf_load_stackoverflow) | 1988-04-15 |
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