JPS57122446A - Copying machine - Google Patents

Copying machine

Info

Publication number
JPS57122446A
JPS57122446A JP15114881A JP15114881A JPS57122446A JP S57122446 A JPS57122446 A JP S57122446A JP 15114881 A JP15114881 A JP 15114881A JP 15114881 A JP15114881 A JP 15114881A JP S57122446 A JPS57122446 A JP S57122446A
Authority
JP
Japan
Prior art keywords
si3n4
semiconductor
drum
make
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15114881A
Other languages
Japanese (ja)
Other versions
JPH0723962B2 (en
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP56151148A priority Critical patent/JPH0723962B2/en
Publication of JPS57122446A publication Critical patent/JPS57122446A/en
Publication of JPH0723962B2 publication Critical patent/JPH0723962B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based
    • G03G5/08278—Depositing methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electrophotography Using Other Than Carlson'S Method (AREA)
  • Photoreceptors In Electrophotography (AREA)

Abstract

PURPOSE:To make plural times of copies at high speed by using the same charge, by providing a semiconductor layer consisting of Si, Si3N4-x, SiC1-x, or SiO2-x of nonmonocrystalline structure, or a layer catching and accumulating charge on a conductive substrate. CONSTITUTION:A gaseous silicide of SiH4, SiH2Cl2, SiCl4, or SiF4 is introduced into a reactor furnace 50 through a pipe 40. When preparing a P type semiconductor, B2H6, or InCl3 diluted with helium or the like is simultaneously introduced as a trivalent impurity. Plasma having 1-50MHz or 1-10GHz frequency, and 100W-1kW power is caused between a drum 42 and electrodes 47, 47' to make DC plasma CVD of the Si element onto the drum heated to 200-400 deg.C. Addition of ammonia produces Si3N4-x (0<x<4) to form a semiinsulator, but not a semiconductor.
JP56151148A 1981-09-24 1981-09-24 Drum type photoconductor manufacturing method Expired - Lifetime JPH0723962B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56151148A JPH0723962B2 (en) 1981-09-24 1981-09-24 Drum type photoconductor manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56151148A JPH0723962B2 (en) 1981-09-24 1981-09-24 Drum type photoconductor manufacturing method

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP8680180A Division JPS5711351A (en) 1980-06-25 1980-06-25 Electrostatic copying machine

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP5287274A Division JP2617417B2 (en) 1993-10-25 1993-10-25 Electrophotographic photoreceptor
JP6126805A Division JP2662707B2 (en) 1994-05-16 1994-05-16 Manufacturing method of drum type photoreceptor

Publications (2)

Publication Number Publication Date
JPS57122446A true JPS57122446A (en) 1982-07-30
JPH0723962B2 JPH0723962B2 (en) 1995-03-15

Family

ID=15512415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56151148A Expired - Lifetime JPH0723962B2 (en) 1981-09-24 1981-09-24 Drum type photoconductor manufacturing method

Country Status (1)

Country Link
JP (1) JPH0723962B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6281642A (en) * 1985-09-30 1987-04-15 ゼロツクス　コ−ポレ−シヨン Overcoating type amorphous silicon image forming member
EP0594453A2 (en) * 1992-10-23 1994-04-27 Canon Kabushiki Kaisha Process for forming deposited film for light-receiving member , light-receiving member produced by the process, deposited film forming apparatus, and method for cleaning deposited film forming apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54145537A (en) * 1978-05-04 1979-11-13 Canon Inc Preparation of electrophotographic image forming material
JPS54145539A (en) * 1978-05-04 1979-11-13 Canon Inc Electrophotographic image forming material
JPS56115573A (en) * 1980-02-15 1981-09-10 Matsushita Electric Ind Co Ltd Photoconductive element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54145537A (en) * 1978-05-04 1979-11-13 Canon Inc Preparation of electrophotographic image forming material
JPS54145539A (en) * 1978-05-04 1979-11-13 Canon Inc Electrophotographic image forming material
JPS56115573A (en) * 1980-02-15 1981-09-10 Matsushita Electric Ind Co Ltd Photoconductive element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6281642A (en) * 1985-09-30 1987-04-15 ゼロツクス　コ−ポレ−シヨン Overcoating type amorphous silicon image forming member
EP0594453A2 (en) * 1992-10-23 1994-04-27 Canon Kabushiki Kaisha Process for forming deposited film for light-receiving member , light-receiving member produced by the process, deposited film forming apparatus, and method for cleaning deposited film forming apparatus
EP0594453A3 (en) * 1992-10-23 1994-09-14 Canon Kk Process for forming deposited film for light-receiving member , light-receiving member produced by the process, deposited film forming apparatus, and method for cleaning deposited film forming apparatus

Also Published As

Publication number Publication date
JPH0723962B2 (en) 1995-03-15

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