JPS5660444A - Electrophotographic receptor - Google Patents
Electrophotographic receptorInfo
- Publication number
- JPS5660444A JPS5660444A JP13675379A JP13675379A JPS5660444A JP S5660444 A JPS5660444 A JP S5660444A JP 13675379 A JP13675379 A JP 13675379A JP 13675379 A JP13675379 A JP 13675379A JP S5660444 A JPS5660444 A JP S5660444A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- amorphous silicon
- conductive substrate
- boron
- sih
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a photoreceptor high in dark resistance, sensitivity, and resolution, by forming an amorphous silicon film having P-N junction formed by electric discharge in silane on a conductive substrate or on a thin insulating film provided on the conductive substrate surface.
CONSTITUTION: Nondoped amorphous silicon layer 13 is formed by electric gas discharge using Ar gas diluted SiH4 on conductive substrate 11 directly or on insulating charge blocking layer 12 made of 1W1,000nm thick SiO2 or the like provided on substrate 11. Then, an amorphous silicon doped with e.g. boron is deposited using boron or aluminum compound e.g. Ar gas containing B2H6 and SiH4 as a positive type impurity of a doping atom on layer 13 to form layer of about 0.2μm thickness, thus permitting a superior electrophotographic receptor consisting chiefly of nonpollutive silicon to be obtained.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13675379A JPS5660444A (en) | 1979-10-23 | 1979-10-23 | Electrophotographic receptor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13675379A JPS5660444A (en) | 1979-10-23 | 1979-10-23 | Electrophotographic receptor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5660444A true JPS5660444A (en) | 1981-05-25 |
Family
ID=15182689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13675379A Pending JPS5660444A (en) | 1979-10-23 | 1979-10-23 | Electrophotographic receptor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5660444A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1983001127A1 (en) * | 1981-09-28 | 1983-03-31 | Matsuzaki, Masatoshi | Image formation method |
JPS58211669A (en) * | 1982-06-03 | 1983-12-09 | Canon Inc | Calibration of surface potential meter |
JPS6055352A (en) * | 1983-09-07 | 1985-03-30 | Oki Electric Ind Co Ltd | Manufacture of electrophotographic sensitive body |
-
1979
- 1979-10-23 JP JP13675379A patent/JPS5660444A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1983001127A1 (en) * | 1981-09-28 | 1983-03-31 | Matsuzaki, Masatoshi | Image formation method |
JPS58211669A (en) * | 1982-06-03 | 1983-12-09 | Canon Inc | Calibration of surface potential meter |
JPH0456262B2 (en) * | 1982-06-03 | 1992-09-07 | Canon Kk | |
JPS6055352A (en) * | 1983-09-07 | 1985-03-30 | Oki Electric Ind Co Ltd | Manufacture of electrophotographic sensitive body |
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