JPS57107549A - Electron microscope having energy analyzer - Google Patents

Electron microscope having energy analyzer

Info

Publication number
JPS57107549A
JPS57107549A JP55183575A JP18357580A JPS57107549A JP S57107549 A JPS57107549 A JP S57107549A JP 55183575 A JP55183575 A JP 55183575A JP 18357580 A JP18357580 A JP 18357580A JP S57107549 A JPS57107549 A JP S57107549A
Authority
JP
Japan
Prior art keywords
electron beam
energy
board
energy analyzer
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55183575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6237503B2 (enrdf_load_stackoverflow
Inventor
Hatsujirou Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP55183575A priority Critical patent/JPS57107549A/ja
Publication of JPS57107549A publication Critical patent/JPS57107549A/ja
Publication of JPS6237503B2 publication Critical patent/JPS6237503B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP55183575A 1980-12-24 1980-12-24 Electron microscope having energy analyzer Granted JPS57107549A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55183575A JPS57107549A (en) 1980-12-24 1980-12-24 Electron microscope having energy analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55183575A JPS57107549A (en) 1980-12-24 1980-12-24 Electron microscope having energy analyzer

Publications (2)

Publication Number Publication Date
JPS57107549A true JPS57107549A (en) 1982-07-05
JPS6237503B2 JPS6237503B2 (enrdf_load_stackoverflow) 1987-08-12

Family

ID=16138204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55183575A Granted JPS57107549A (en) 1980-12-24 1980-12-24 Electron microscope having energy analyzer

Country Status (1)

Country Link
JP (1) JPS57107549A (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50104983A (enrdf_load_stackoverflow) * 1974-01-22 1975-08-19
JPS52117691A (en) * 1976-03-29 1977-10-03 Hitachi Ltd Charged particle detector
JPS55144577A (en) * 1979-04-28 1980-11-11 Hitachi Ltd Energy analyzer for electron ray

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50104983A (enrdf_load_stackoverflow) * 1974-01-22 1975-08-19
JPS52117691A (en) * 1976-03-29 1977-10-03 Hitachi Ltd Charged particle detector
JPS55144577A (en) * 1979-04-28 1980-11-11 Hitachi Ltd Energy analyzer for electron ray

Also Published As

Publication number Publication date
JPS6237503B2 (enrdf_load_stackoverflow) 1987-08-12

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