JPS52117691A - Charged particle detector - Google Patents

Charged particle detector

Info

Publication number
JPS52117691A
JPS52117691A JP3366076A JP3366076A JPS52117691A JP S52117691 A JPS52117691 A JP S52117691A JP 3366076 A JP3366076 A JP 3366076A JP 3366076 A JP3366076 A JP 3366076A JP S52117691 A JPS52117691 A JP S52117691A
Authority
JP
Japan
Prior art keywords
charged particle
particle detector
irradiating
compensate
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3366076A
Other languages
Japanese (ja)
Inventor
Kazumitsu Nakamura
Hiroshi Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3366076A priority Critical patent/JPS52117691A/en
Publication of JPS52117691A publication Critical patent/JPS52117691A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To compensate highly precisely the background absorption by irradiating the atomic vapor of a sample, to which a magnetic field is applied, with a bright line of single wavelength which has a plurality of different diffracting directions.
COPYRIGHT: (C)1977,JPO&Japio
JP3366076A 1976-03-29 1976-03-29 Charged particle detector Pending JPS52117691A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3366076A JPS52117691A (en) 1976-03-29 1976-03-29 Charged particle detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3366076A JPS52117691A (en) 1976-03-29 1976-03-29 Charged particle detector

Publications (1)

Publication Number Publication Date
JPS52117691A true JPS52117691A (en) 1977-10-03

Family

ID=12392592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3366076A Pending JPS52117691A (en) 1976-03-29 1976-03-29 Charged particle detector

Country Status (1)

Country Link
JP (1) JPS52117691A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57107549A (en) * 1980-12-24 1982-07-05 Jeol Ltd Electron microscope having energy analyzer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57107549A (en) * 1980-12-24 1982-07-05 Jeol Ltd Electron microscope having energy analyzer
JPS6237503B2 (en) * 1980-12-24 1987-08-12 Nippon Electron Optics Lab

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