JPS6237503B2 - - Google Patents

Info

Publication number
JPS6237503B2
JPS6237503B2 JP55183575A JP18357580A JPS6237503B2 JP S6237503 B2 JPS6237503 B2 JP S6237503B2 JP 55183575 A JP55183575 A JP 55183575A JP 18357580 A JP18357580 A JP 18357580A JP S6237503 B2 JPS6237503 B2 JP S6237503B2
Authority
JP
Japan
Prior art keywords
image
energy
electron
electron beam
energy analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55183575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57107549A (en
Inventor
Hatsujiro Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP55183575A priority Critical patent/JPS57107549A/ja
Publication of JPS57107549A publication Critical patent/JPS57107549A/ja
Publication of JPS6237503B2 publication Critical patent/JPS6237503B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP55183575A 1980-12-24 1980-12-24 Electron microscope having energy analyzer Granted JPS57107549A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55183575A JPS57107549A (en) 1980-12-24 1980-12-24 Electron microscope having energy analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55183575A JPS57107549A (en) 1980-12-24 1980-12-24 Electron microscope having energy analyzer

Publications (2)

Publication Number Publication Date
JPS57107549A JPS57107549A (en) 1982-07-05
JPS6237503B2 true JPS6237503B2 (enrdf_load_stackoverflow) 1987-08-12

Family

ID=16138204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55183575A Granted JPS57107549A (en) 1980-12-24 1980-12-24 Electron microscope having energy analyzer

Country Status (1)

Country Link
JP (1) JPS57107549A (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5811569B2 (ja) * 1974-01-22 1983-03-03 日本電子株式会社 デンシブンコウソウチ
JPS52117691A (en) * 1976-03-29 1977-10-03 Hitachi Ltd Charged particle detector
JPS55144577A (en) * 1979-04-28 1980-11-11 Hitachi Ltd Energy analyzer for electron ray

Also Published As

Publication number Publication date
JPS57107549A (en) 1982-07-05

Similar Documents

Publication Publication Date Title
Dunlap et al. Introduction to the scanning electron microscope
JP2810797B2 (ja) 反射電子顕微鏡
US4633085A (en) Transmission-type electron microscope
US4479060A (en) Apparatus for irradiation with charged particle beams
JPS55121259A (en) Elelctron microscope
JPS614144A (ja) 電子顕微鏡による回折パタ−ン表示方法
JPS5727551A (en) Electron microscope
JPS6237503B2 (enrdf_load_stackoverflow)
Oatley et al. The development of the scanning electron microscope
JPS5847826B2 (ja) 粒子線装置を用いて低倍率で詩料を結像させる方法
DE2640260C3 (de) Durchstrahl ungs-Raster-Korpuskularstrahlniikroskop
JPH04229939A (ja) 電子ビーム装置
JPH0541195A (ja) 走査型電子顕微鏡装置
JPH045363B2 (enrdf_load_stackoverflow)
US3401261A (en) Apparatus for investigating magnetic regions in thin material layers
JP2839683B2 (ja) フーコー電子顕微鏡
JPS61193349A (ja) 電子顕微鏡における電子線照射方法
JPS5533716A (en) Electron microscope focusing lens system
JPS61277141A (ja) 磁界型エネルギ−フイルタ−
JP3064335B2 (ja) 透過型電子顕微鏡
JPS6329928B2 (enrdf_load_stackoverflow)
JPS582856U (ja) 透過走査像観察装置
Jain An Introduction To Electron Microscope
Zworykin et al. Electronic microscopy
JPS5825044A (ja) 結像レンズ系をエネルギ−・アナライザ−として用いる電子顕微鏡