JPS57104667A - Etching solution for metal - Google Patents

Etching solution for metal

Info

Publication number
JPS57104667A
JPS57104667A JP18039680A JP18039680A JPS57104667A JP S57104667 A JPS57104667 A JP S57104667A JP 18039680 A JP18039680 A JP 18039680A JP 18039680 A JP18039680 A JP 18039680A JP S57104667 A JPS57104667 A JP S57104667A
Authority
JP
Japan
Prior art keywords
soln
etching
substrate
thin film
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18039680A
Other languages
Japanese (ja)
Inventor
Hiroshi Yamamoto
Yukihisa Tsukada
Masahide Suenaga
Noboru Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP18039680A priority Critical patent/JPS57104667A/en
Publication of JPS57104667A publication Critical patent/JPS57104667A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/36—Alkaline compositions for etching aluminium or alloys thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/38—Alkaline compositions for etching refractory metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE:To provide an etching soln. for working a metallic thin film of Al, Cr or the like formed on a substrate which is easily affected by an acidic etching soln. using a photoresist which is easily affected by strong base as a mask by dissolving KOH, K3Fe(CN)6 and NaH2PO4 and/or Na2HPO4 in water. CONSTITUTION:The desired etching soln. for metal is prepared from an aqueous soln. contg. 0.10-0.30mol%/l KOH, 0.06-0.30mol%/l K3Fe(CN)6 and 0.1- 0.3mol%/l NaH2PO4 and/or Na2HPO4. A thin film of Al or the like formed on a thin film of Permalloy or the like as a substrate can be etched using the etching soln. without eroding the substrate film and deteriorating the adhesion of a photoresist film. The practical temp. of the soln. during etching is 20-40 deg.C in general.
JP18039680A 1980-12-22 1980-12-22 Etching solution for metal Pending JPS57104667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18039680A JPS57104667A (en) 1980-12-22 1980-12-22 Etching solution for metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18039680A JPS57104667A (en) 1980-12-22 1980-12-22 Etching solution for metal

Publications (1)

Publication Number Publication Date
JPS57104667A true JPS57104667A (en) 1982-06-29

Family

ID=16082499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18039680A Pending JPS57104667A (en) 1980-12-22 1980-12-22 Etching solution for metal

Country Status (1)

Country Link
JP (1) JPS57104667A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005073433A1 (en) * 2004-01-29 2005-08-11 Unaxis Balzers Ag Method for removing a coating and single-chamber device for carrying out said method
US7077918B2 (en) 2004-01-29 2006-07-18 Unaxis Balzers Ltd. Stripping apparatus and method for removal of coatings on metal surfaces
CH705281B1 (en) * 2004-01-29 2013-01-31 Oerlikon Trading Ag Process for removing a layer system from a workpiece comprises applying a chromium- and aluminum-containing layer directly on the workpiece, and removing the coating on the workpiece using an alkaline solution

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005073433A1 (en) * 2004-01-29 2005-08-11 Unaxis Balzers Ag Method for removing a coating and single-chamber device for carrying out said method
US7077918B2 (en) 2004-01-29 2006-07-18 Unaxis Balzers Ltd. Stripping apparatus and method for removal of coatings on metal surfaces
CH705281B1 (en) * 2004-01-29 2013-01-31 Oerlikon Trading Ag Process for removing a layer system from a workpiece comprises applying a chromium- and aluminum-containing layer directly on the workpiece, and removing the coating on the workpiece using an alkaline solution

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