JPS5647571A - Etching liquid for mo - Google Patents

Etching liquid for mo

Info

Publication number
JPS5647571A
JPS5647571A JP12496979A JP12496979A JPS5647571A JP S5647571 A JPS5647571 A JP S5647571A JP 12496979 A JP12496979 A JP 12496979A JP 12496979 A JP12496979 A JP 12496979A JP S5647571 A JPS5647571 A JP S5647571A
Authority
JP
Japan
Prior art keywords
etching liquid
iodic acid
water
etching
concn
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12496979A
Other languages
Japanese (ja)
Inventor
Kohei Higuchi
Hidekazu Okabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12496979A priority Critical patent/JPS5647571A/en
Publication of JPS5647571A publication Critical patent/JPS5647571A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/26—Acidic compositions for etching refractory metals

Abstract

PURPOSE:To enable the fine processing by using the etching liquid for Mo containing iodic acid. CONSTITUTION:This iodic acid containing etching liquid is prepared by using water, an aqueous ammonia solution and an org. solvent forming a mixed solution with water and the concn. of iodic acid is adjusted to 0.03-1wt%. This etching liquid has a rapid etching speed for Mo and can form fine patterns on a surface or a thin layer.
JP12496979A 1979-09-28 1979-09-28 Etching liquid for mo Pending JPS5647571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12496979A JPS5647571A (en) 1979-09-28 1979-09-28 Etching liquid for mo

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12496979A JPS5647571A (en) 1979-09-28 1979-09-28 Etching liquid for mo

Publications (1)

Publication Number Publication Date
JPS5647571A true JPS5647571A (en) 1981-04-30

Family

ID=14898694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12496979A Pending JPS5647571A (en) 1979-09-28 1979-09-28 Etching liquid for mo

Country Status (1)

Country Link
JP (1) JPS5647571A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6537357B2 (en) * 2001-02-20 2003-03-25 Glenn Paul Wampole, Sr. Treatment of wood, wood fiber products, and porous surfaces with periodic acid and iodic acid
WO2004040633A1 (en) * 2002-10-25 2004-05-13 Intersurface Dynamics, Inc. Method for using additives in the caustic etching of silicon for obtaining improved surface characteristics
US7179327B2 (en) 2001-02-20 2007-02-20 Wampole Sr Glenn P Wood treatment process and chemical composition

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6537357B2 (en) * 2001-02-20 2003-03-25 Glenn Paul Wampole, Sr. Treatment of wood, wood fiber products, and porous surfaces with periodic acid and iodic acid
US7179327B2 (en) 2001-02-20 2007-02-20 Wampole Sr Glenn P Wood treatment process and chemical composition
WO2004040633A1 (en) * 2002-10-25 2004-05-13 Intersurface Dynamics, Inc. Method for using additives in the caustic etching of silicon for obtaining improved surface characteristics

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