JPS5699979A - Manufacture of super ionic conductive thin film - Google Patents
Manufacture of super ionic conductive thin filmInfo
- Publication number
- JPS5699979A JPS5699979A JP133180A JP133180A JPS5699979A JP S5699979 A JPS5699979 A JP S5699979A JP 133180 A JP133180 A JP 133180A JP 133180 A JP133180 A JP 133180A JP S5699979 A JPS5699979 A JP S5699979A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- ionic conductive
- powder
- super ionic
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000843 powder Substances 0.000 abstract 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 abstract 4
- 238000004544 sputter deposition Methods 0.000 abstract 3
- 239000002585 base Substances 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 2
- 229910000029 sodium carbonate Inorganic materials 0.000 abstract 2
- 235000017550 sodium carbonate Nutrition 0.000 abstract 2
- 229910005833 GeO4 Inorganic materials 0.000 abstract 1
- 229910010092 LiAlO2 Inorganic materials 0.000 abstract 1
- 229910010936 LiGaO2 Inorganic materials 0.000 abstract 1
- 229910003249 Na3Zr2Si2PO12 Inorganic materials 0.000 abstract 1
- -1 NaGaO2 Inorganic materials 0.000 abstract 1
- 239000003513 alkali Substances 0.000 abstract 1
- 150000001339 alkali metal compounds Chemical class 0.000 abstract 1
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 abstract 1
- 229910052808 lithium carbonate Inorganic materials 0.000 abstract 1
- 239000002994 raw material Substances 0.000 abstract 1
- 229910001388 sodium aluminate Inorganic materials 0.000 abstract 1
- 238000005477 sputtering target Methods 0.000 abstract 1
- 229910006587 β-Al2O3 Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M6/00—Primary cells; Manufacture thereof
- H01M6/14—Cells with non-aqueous electrolyte
- H01M6/18—Cells with non-aqueous electrolyte with solid electrolyte
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Primary Cells (AREA)
- Secondary Cells (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP133180A JPS5699979A (en) | 1980-01-11 | 1980-01-11 | Manufacture of super ionic conductive thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP133180A JPS5699979A (en) | 1980-01-11 | 1980-01-11 | Manufacture of super ionic conductive thin film |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58105856A Division JPS5931569A (ja) | 1983-06-15 | 1983-06-15 | 全固体電池 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5699979A true JPS5699979A (en) | 1981-08-11 |
| JPH0128465B2 JPH0128465B2 (enrdf_load_stackoverflow) | 1989-06-02 |
Family
ID=11498509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP133180A Granted JPS5699979A (en) | 1980-01-11 | 1980-01-11 | Manufacture of super ionic conductive thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5699979A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5931569A (ja) * | 1983-06-15 | 1984-02-20 | Hitachi Ltd | 全固体電池 |
| JPS5937604A (ja) * | 1983-06-15 | 1984-03-01 | 株式会社日立製作所 | 超イオン伝導性薄膜の作成方法 |
| JPS63206462A (ja) * | 1987-02-24 | 1988-08-25 | Kawatetsu Kogyo Kk | 導電性又は超伝導性薄膜の製造方法 |
| KR100294467B1 (ko) * | 1994-06-07 | 2001-10-24 | 남창우 | 나트륨-유황전지용고체전해질의제조방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5085585A (enrdf_load_stackoverflow) * | 1973-12-03 | 1975-07-10 |
-
1980
- 1980-01-11 JP JP133180A patent/JPS5699979A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5085585A (enrdf_load_stackoverflow) * | 1973-12-03 | 1975-07-10 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5931569A (ja) * | 1983-06-15 | 1984-02-20 | Hitachi Ltd | 全固体電池 |
| JPS5937604A (ja) * | 1983-06-15 | 1984-03-01 | 株式会社日立製作所 | 超イオン伝導性薄膜の作成方法 |
| JPS63206462A (ja) * | 1987-02-24 | 1988-08-25 | Kawatetsu Kogyo Kk | 導電性又は超伝導性薄膜の製造方法 |
| KR100294467B1 (ko) * | 1994-06-07 | 2001-10-24 | 남창우 | 나트륨-유황전지용고체전해질의제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0128465B2 (enrdf_load_stackoverflow) | 1989-06-02 |
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