JPS5699979A - Manufacture of super ionic conductive thin film - Google Patents

Manufacture of super ionic conductive thin film

Info

Publication number
JPS5699979A
JPS5699979A JP133180A JP133180A JPS5699979A JP S5699979 A JPS5699979 A JP S5699979A JP 133180 A JP133180 A JP 133180A JP 133180 A JP133180 A JP 133180A JP S5699979 A JPS5699979 A JP S5699979A
Authority
JP
Japan
Prior art keywords
thin film
ionic conductive
powder
super ionic
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP133180A
Other languages
Japanese (ja)
Other versions
JPH0128465B2 (en
Inventor
Katsumi Miyauchi
Tetsuichi Kudo
Yasuo Suganuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP133180A priority Critical patent/JPS5699979A/en
Publication of JPS5699979A publication Critical patent/JPS5699979A/en
Publication of JPH0128465B2 publication Critical patent/JPH0128465B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M6/00—Primary cells; Manufacture thereof
    • H01M6/14—Cells with non-aqueous electrolyte
    • H01M6/18—Cells with non-aqueous electrolyte with solid electrolyte

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Primary Cells (AREA)
  • Secondary Cells (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To obtain a super ionic conductive thin film, by coating a base with powder, which is made by mixing a super ionic conductive compound and an alkali metal compound, by a sputtering method. CONSTITUTION:A thin film is formed by coating a base through a sputtering methode, using powder, which is the mixture of a super ionic conductive compound of beta-Al2O3, beta-Ga2O3, Na3Zr2Si2PO12, Li14Zn(GeO4) or the like and an alkali com pound of LiAlO2, LiGaO2, Li2CO3, NaAlO2, NaGaO2, Na2CO3 or the like, as a sputtering target. For example, Na-beta''-Ca2O3 is made by making, the mixture of raw material powders of Ga2O3 and Na2CO3 with the mol ratio of 4:1, to react for 10hr at 1,100 deg.C. NaGaO2 powder is also made through a similar procedure by adjusting mole ratio. A thin film is formed by a sputtering up method, using powder made by mixing these powders at the ratio of 1:2 as the target.
JP133180A 1980-01-11 1980-01-11 Manufacture of super ionic conductive thin film Granted JPS5699979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP133180A JPS5699979A (en) 1980-01-11 1980-01-11 Manufacture of super ionic conductive thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP133180A JPS5699979A (en) 1980-01-11 1980-01-11 Manufacture of super ionic conductive thin film

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP58105856A Division JPS5931569A (en) 1983-06-15 1983-06-15 Whole solid battery

Publications (2)

Publication Number Publication Date
JPS5699979A true JPS5699979A (en) 1981-08-11
JPH0128465B2 JPH0128465B2 (en) 1989-06-02

Family

ID=11498509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP133180A Granted JPS5699979A (en) 1980-01-11 1980-01-11 Manufacture of super ionic conductive thin film

Country Status (1)

Country Link
JP (1) JPS5699979A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931569A (en) * 1983-06-15 1984-02-20 Hitachi Ltd Whole solid battery
JPS5937604A (en) * 1983-06-15 1984-03-01 株式会社日立製作所 Method of forming superion conductive thin film
JPS63206462A (en) * 1987-02-24 1988-08-25 Kawatetsu Kogyo Kk Production of thin conductive or superconductive film
KR100294467B1 (en) * 1994-06-07 2001-10-24 남창우 Process for producing solid electrolyte for sodium-sulfur battery

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5085585A (en) * 1973-12-03 1975-07-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5085585A (en) * 1973-12-03 1975-07-10

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931569A (en) * 1983-06-15 1984-02-20 Hitachi Ltd Whole solid battery
JPS5937604A (en) * 1983-06-15 1984-03-01 株式会社日立製作所 Method of forming superion conductive thin film
JPS63206462A (en) * 1987-02-24 1988-08-25 Kawatetsu Kogyo Kk Production of thin conductive or superconductive film
KR100294467B1 (en) * 1994-06-07 2001-10-24 남창우 Process for producing solid electrolyte for sodium-sulfur battery

Also Published As

Publication number Publication date
JPH0128465B2 (en) 1989-06-02

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