JPS5698869A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS5698869A JPS5698869A JP158380A JP158380A JPS5698869A JP S5698869 A JPS5698869 A JP S5698869A JP 158380 A JP158380 A JP 158380A JP 158380 A JP158380 A JP 158380A JP S5698869 A JPS5698869 A JP S5698869A
- Authority
- JP
- Japan
- Prior art keywords
- region
- film
- type
- opening
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP158380A JPS5698869A (en) | 1980-01-10 | 1980-01-10 | Preparation of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP158380A JPS5698869A (en) | 1980-01-10 | 1980-01-10 | Preparation of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5698869A true JPS5698869A (en) | 1981-08-08 |
Family
ID=11505530
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP158380A Pending JPS5698869A (en) | 1980-01-10 | 1980-01-10 | Preparation of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5698869A (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS516481A (en) * | 1974-07-05 | 1976-01-20 | Hitachi Ltd | Zetsuengeeto 4 kyoku fet |
JPS53123680A (en) * | 1977-04-01 | 1978-10-28 | Nat Semiconductor Corp | Mosfet ic and method of producing same |
JPS53127289A (en) * | 1977-04-13 | 1978-11-07 | Fujitsu Ltd | Potentiometer |
-
1980
- 1980-01-10 JP JP158380A patent/JPS5698869A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS516481A (en) * | 1974-07-05 | 1976-01-20 | Hitachi Ltd | Zetsuengeeto 4 kyoku fet |
JPS53123680A (en) * | 1977-04-01 | 1978-10-28 | Nat Semiconductor Corp | Mosfet ic and method of producing same |
JPS53127289A (en) * | 1977-04-13 | 1978-11-07 | Fujitsu Ltd | Potentiometer |
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