JPS569161A - Grinding method for ceramic or crystallized substrate - Google Patents
Grinding method for ceramic or crystallized substrateInfo
- Publication number
- JPS569161A JPS569161A JP8205579A JP8205579A JPS569161A JP S569161 A JPS569161 A JP S569161A JP 8205579 A JP8205579 A JP 8205579A JP 8205579 A JP8205579 A JP 8205579A JP S569161 A JPS569161 A JP S569161A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- warpage
- convex
- effected
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title abstract 6
- 239000000919 ceramic Substances 0.000 title abstract 2
- 229910003460 diamond Inorganic materials 0.000 abstract 2
- 239000010432 diamond Substances 0.000 abstract 2
- 125000006850 spacer group Chemical group 0.000 abstract 2
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8205579A JPS569161A (en) | 1979-06-30 | 1979-06-30 | Grinding method for ceramic or crystallized substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8205579A JPS569161A (en) | 1979-06-30 | 1979-06-30 | Grinding method for ceramic or crystallized substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS569161A true JPS569161A (en) | 1981-01-30 |
| JPS6240141B2 JPS6240141B2 (enExample) | 1987-08-26 |
Family
ID=13763820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8205579A Granted JPS569161A (en) | 1979-06-30 | 1979-06-30 | Grinding method for ceramic or crystallized substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS569161A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62106752U (enExample) * | 1985-12-26 | 1987-07-08 | ||
| JP2000084838A (ja) * | 1998-09-04 | 2000-03-28 | Nec Kansai Ltd | 研磨装置及び研磨方法 |
| CN116160321A (zh) * | 2022-12-14 | 2023-05-26 | 上海中晶企业发展有限公司 | 光学镜片平面面形补偿抛光方法 |
-
1979
- 1979-06-30 JP JP8205579A patent/JPS569161A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62106752U (enExample) * | 1985-12-26 | 1987-07-08 | ||
| JP2000084838A (ja) * | 1998-09-04 | 2000-03-28 | Nec Kansai Ltd | 研磨装置及び研磨方法 |
| CN116160321A (zh) * | 2022-12-14 | 2023-05-26 | 上海中晶企业发展有限公司 | 光学镜片平面面形补偿抛光方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6240141B2 (enExample) | 1987-08-26 |
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