JPS5688247A - Electron beam picture displaying method and its device - Google Patents

Electron beam picture displaying method and its device

Info

Publication number
JPS5688247A
JPS5688247A JP16604279A JP16604279A JPS5688247A JP S5688247 A JPS5688247 A JP S5688247A JP 16604279 A JP16604279 A JP 16604279A JP 16604279 A JP16604279 A JP 16604279A JP S5688247 A JPS5688247 A JP S5688247A
Authority
JP
Japan
Prior art keywords
electron beam
fed
sample
signals
signals obtained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16604279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6231474B2 (enrdf_load_stackoverflow
Inventor
Junichi Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP16604279A priority Critical patent/JPS5688247A/ja
Publication of JPS5688247A publication Critical patent/JPS5688247A/ja
Publication of JPS6231474B2 publication Critical patent/JPS6231474B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP16604279A 1979-12-20 1979-12-20 Electron beam picture displaying method and its device Granted JPS5688247A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16604279A JPS5688247A (en) 1979-12-20 1979-12-20 Electron beam picture displaying method and its device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16604279A JPS5688247A (en) 1979-12-20 1979-12-20 Electron beam picture displaying method and its device

Publications (2)

Publication Number Publication Date
JPS5688247A true JPS5688247A (en) 1981-07-17
JPS6231474B2 JPS6231474B2 (enrdf_load_stackoverflow) 1987-07-08

Family

ID=15823867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16604279A Granted JPS5688247A (en) 1979-12-20 1979-12-20 Electron beam picture displaying method and its device

Country Status (1)

Country Link
JP (1) JPS5688247A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103258A (ja) * 1982-12-03 1984-06-14 Akashi Seisakusho Co Ltd 走査型荷電粒子線装置における走査方法およびその装置
WO2013015040A1 (ja) * 2011-07-26 2013-01-31 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び計測方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103258A (ja) * 1982-12-03 1984-06-14 Akashi Seisakusho Co Ltd 走査型荷電粒子線装置における走査方法およびその装置
WO2013015040A1 (ja) * 2011-07-26 2013-01-31 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び計測方法
JP2013030277A (ja) * 2011-07-26 2013-02-07 Hitachi High-Technologies Corp 荷電粒子線装置及び計測方法

Also Published As

Publication number Publication date
JPS6231474B2 (enrdf_load_stackoverflow) 1987-07-08

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