JPS57154758A - Scanning type electron microscope - Google Patents

Scanning type electron microscope

Info

Publication number
JPS57154758A
JPS57154758A JP4142781A JP4142781A JPS57154758A JP S57154758 A JPS57154758 A JP S57154758A JP 4142781 A JP4142781 A JP 4142781A JP 4142781 A JP4142781 A JP 4142781A JP S57154758 A JPS57154758 A JP S57154758A
Authority
JP
Japan
Prior art keywords
strength
scanning line
maximum
signals
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4142781A
Other languages
Japanese (ja)
Inventor
Hisakazu Nishiura
Masashi Otaka
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4142781A priority Critical patent/JPS57154758A/en
Publication of JPS57154758A publication Critical patent/JPS57154758A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Abstract

PURPOSE:To photograph a continuous picture with constant color by detecting the maximum and the minimum values of strength of a signal corresponding to one scanning line, comparing the strength of signals on the basis of their maximum and minimum strength, and enabling the results of the above detection and comparison to be memorized. CONSTITUTION:An electrom beam 1 is irradiated on a sample 2 while the sample 2 is scanned. Signals generated from the sample 2 are displayed as pictures on a Braun tube 5 by means of a detector 3, and are photographed with a photographing equipment 6. Here, the maximum and the minimum values of strength of a signal corresponding to one scanning line are detected and subtracted from one another. At the same time, the maximum values of the strength of signals are compared by means of a comparator 15, the location of the scanning line is detected with a position detecting circuit 16, and the results are stored in a memory 17. Following that, the results sent from the circuit 14 and the memory 17 are displayed on a display panel 18 by being controlled with a control box 19. Consequently, a continuous picture with constant color can be photographed by comparing strength of signals each corresponding to one scanning line.
JP4142781A 1981-03-19 1981-03-19 Scanning type electron microscope Pending JPS57154758A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4142781A JPS57154758A (en) 1981-03-19 1981-03-19 Scanning type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4142781A JPS57154758A (en) 1981-03-19 1981-03-19 Scanning type electron microscope

Publications (1)

Publication Number Publication Date
JPS57154758A true JPS57154758A (en) 1982-09-24

Family

ID=12608057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4142781A Pending JPS57154758A (en) 1981-03-19 1981-03-19 Scanning type electron microscope

Country Status (1)

Country Link
JP (1) JPS57154758A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164151A (en) * 1986-12-26 1988-07-07 Fuji Photo Film Co Ltd Electron microscope image output method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164151A (en) * 1986-12-26 1988-07-07 Fuji Photo Film Co Ltd Electron microscope image output method

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