JPS6231474B2 - - Google Patents
Info
- Publication number
- JPS6231474B2 JPS6231474B2 JP54166042A JP16604279A JPS6231474B2 JP S6231474 B2 JPS6231474 B2 JP S6231474B2 JP 54166042 A JP54166042 A JP 54166042A JP 16604279 A JP16604279 A JP 16604279A JP S6231474 B2 JPS6231474 B2 JP S6231474B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- scanning
- supplied
- circuit
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 5
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16604279A JPS5688247A (en) | 1979-12-20 | 1979-12-20 | Electron beam picture displaying method and its device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16604279A JPS5688247A (en) | 1979-12-20 | 1979-12-20 | Electron beam picture displaying method and its device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5688247A JPS5688247A (en) | 1981-07-17 |
| JPS6231474B2 true JPS6231474B2 (enrdf_load_stackoverflow) | 1987-07-08 |
Family
ID=15823867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16604279A Granted JPS5688247A (en) | 1979-12-20 | 1979-12-20 | Electron beam picture displaying method and its device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5688247A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59103258A (ja) * | 1982-12-03 | 1984-06-14 | Akashi Seisakusho Co Ltd | 走査型荷電粒子線装置における走査方法およびその装置 |
| JP5777967B2 (ja) * | 2011-07-26 | 2015-09-16 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及び計測方法 |
-
1979
- 1979-12-20 JP JP16604279A patent/JPS5688247A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5688247A (en) | 1981-07-17 |
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