JPS5687366A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5687366A JPS5687366A JP16442279A JP16442279A JPS5687366A JP S5687366 A JPS5687366 A JP S5687366A JP 16442279 A JP16442279 A JP 16442279A JP 16442279 A JP16442279 A JP 16442279A JP S5687366 A JPS5687366 A JP S5687366A
- Authority
- JP
- Japan
- Prior art keywords
- film
- polycrystalline
- contact hole
- si3n4
- sio2
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16442279A JPS5687366A (en) | 1979-12-17 | 1979-12-17 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16442279A JPS5687366A (en) | 1979-12-17 | 1979-12-17 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5687366A true JPS5687366A (en) | 1981-07-15 |
Family
ID=15792838
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16442279A Pending JPS5687366A (en) | 1979-12-17 | 1979-12-17 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5687366A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6477169A (en) * | 1987-09-18 | 1989-03-23 | Fujitsu Ltd | Manufacture of mos transistor |
-
1979
- 1979-12-17 JP JP16442279A patent/JPS5687366A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6477169A (en) * | 1987-09-18 | 1989-03-23 | Fujitsu Ltd | Manufacture of mos transistor |
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