JPS5676561A - Manufacture of semiconductor integrated circuit - Google Patents

Manufacture of semiconductor integrated circuit

Info

Publication number
JPS5676561A
JPS5676561A JP15360179A JP15360179A JPS5676561A JP S5676561 A JPS5676561 A JP S5676561A JP 15360179 A JP15360179 A JP 15360179A JP 15360179 A JP15360179 A JP 15360179A JP S5676561 A JPS5676561 A JP S5676561A
Authority
JP
Japan
Prior art keywords
type
layer
base
impurity
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15360179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6217384B2 (enrdf_load_stackoverflow
Inventor
Koichi Kanzaki
Minoru Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15360179A priority Critical patent/JPS5676561A/ja
Priority to EP80304302A priority patent/EP0030147B1/en
Priority to DE8080304302T priority patent/DE3063191D1/de
Priority to US06/210,759 priority patent/US4404737A/en
Publication of JPS5676561A publication Critical patent/JPS5676561A/ja
Publication of JPS6217384B2 publication Critical patent/JPS6217384B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/211—Design considerations for internal polarisation

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP15360179A 1979-11-29 1979-11-29 Manufacture of semiconductor integrated circuit Granted JPS5676561A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP15360179A JPS5676561A (en) 1979-11-29 1979-11-29 Manufacture of semiconductor integrated circuit
EP80304302A EP0030147B1 (en) 1979-11-29 1980-11-28 Method for manufacturing a semiconductor integrated circuit
DE8080304302T DE3063191D1 (en) 1979-11-29 1980-11-28 Method for manufacturing a semiconductor integrated circuit
US06/210,759 US4404737A (en) 1979-11-29 1980-11-28 Method for manufacturing a semiconductor integrated circuit utilizing polycrystalline silicon deposition, oxidation and etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15360179A JPS5676561A (en) 1979-11-29 1979-11-29 Manufacture of semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS5676561A true JPS5676561A (en) 1981-06-24
JPS6217384B2 JPS6217384B2 (enrdf_load_stackoverflow) 1987-04-17

Family

ID=15566042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15360179A Granted JPS5676561A (en) 1979-11-29 1979-11-29 Manufacture of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5676561A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03221177A (ja) * 1990-01-26 1991-09-30 Uchinami:Kk 空中洗浄乾燥装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5091288A (enrdf_load_stackoverflow) * 1973-12-12 1975-07-21
JPS52117579A (en) * 1976-03-30 1977-10-03 Nec Corp Semiconductor device
JPS53132275A (en) * 1977-04-25 1978-11-17 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and its production
JPS53142196A (en) * 1977-05-18 1978-12-11 Hitachi Ltd Bipolar type semiconductor device
JPS5482175A (en) * 1977-12-14 1979-06-30 Nippon Telegr & Teleph Corp <Ntt> Field effect transistor and its manufacture

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5091288A (enrdf_load_stackoverflow) * 1973-12-12 1975-07-21
JPS52117579A (en) * 1976-03-30 1977-10-03 Nec Corp Semiconductor device
JPS53132275A (en) * 1977-04-25 1978-11-17 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and its production
JPS53142196A (en) * 1977-05-18 1978-12-11 Hitachi Ltd Bipolar type semiconductor device
JPS5482175A (en) * 1977-12-14 1979-06-30 Nippon Telegr & Teleph Corp <Ntt> Field effect transistor and its manufacture

Also Published As

Publication number Publication date
JPS6217384B2 (enrdf_load_stackoverflow) 1987-04-17

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