JPS567482A - Manufacturing of semiconductor device - Google Patents

Manufacturing of semiconductor device

Info

Publication number
JPS567482A
JPS567482A JP8136079A JP8136079A JPS567482A JP S567482 A JPS567482 A JP S567482A JP 8136079 A JP8136079 A JP 8136079A JP 8136079 A JP8136079 A JP 8136079A JP S567482 A JPS567482 A JP S567482A
Authority
JP
Japan
Prior art keywords
film
region
substrate
layer
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8136079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244700B2 (enExample
Inventor
Yasunobu Osa
Jun Sugiura
Kazuhiro Komori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8136079A priority Critical patent/JPS567482A/ja
Publication of JPS567482A publication Critical patent/JPS567482A/ja
Publication of JPS6244700B2 publication Critical patent/JPS6244700B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP8136079A 1979-06-29 1979-06-29 Manufacturing of semiconductor device Granted JPS567482A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8136079A JPS567482A (en) 1979-06-29 1979-06-29 Manufacturing of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8136079A JPS567482A (en) 1979-06-29 1979-06-29 Manufacturing of semiconductor device

Publications (2)

Publication Number Publication Date
JPS567482A true JPS567482A (en) 1981-01-26
JPS6244700B2 JPS6244700B2 (enExample) 1987-09-22

Family

ID=13744168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8136079A Granted JPS567482A (en) 1979-06-29 1979-06-29 Manufacturing of semiconductor device

Country Status (1)

Country Link
JP (1) JPS567482A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587833A (ja) * 1981-06-30 1983-01-17 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン 回路装置組立体
JPS5850771A (ja) * 1981-09-21 1983-03-25 Hitachi Ltd 再書込み可能な高集積ｒｏｍ及びその製造方法
JPS63205964A (ja) * 1987-02-21 1988-08-25 Toshiba Corp 半導体記憶装置およびその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587833A (ja) * 1981-06-30 1983-01-17 インタ−ナシヨナル・ビジネス・マシ−ンズ・コ−ポレ−シヨン 回路装置組立体
JPS5850771A (ja) * 1981-09-21 1983-03-25 Hitachi Ltd 再書込み可能な高集積ｒｏｍ及びその製造方法
JPS63205964A (ja) * 1987-02-21 1988-08-25 Toshiba Corp 半導体記憶装置およびその製造方法

Also Published As

Publication number Publication date
JPS6244700B2 (enExample) 1987-09-22

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