JPS5664450A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5664450A
JPS5664450A JP14064179A JP14064179A JPS5664450A JP S5664450 A JPS5664450 A JP S5664450A JP 14064179 A JP14064179 A JP 14064179A JP 14064179 A JP14064179 A JP 14064179A JP S5664450 A JPS5664450 A JP S5664450A
Authority
JP
Japan
Prior art keywords
film
doped
electrode
psg
sio2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14064179A
Other languages
English (en)
Inventor
Toru Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP14064179A priority Critical patent/JPS5664450A/ja
Publication of JPS5664450A publication Critical patent/JPS5664450A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP14064179A 1979-10-31 1979-10-31 Semiconductor device Pending JPS5664450A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14064179A JPS5664450A (en) 1979-10-31 1979-10-31 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14064179A JPS5664450A (en) 1979-10-31 1979-10-31 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5664450A true JPS5664450A (en) 1981-06-01

Family

ID=15273391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14064179A Pending JPS5664450A (en) 1979-10-31 1979-10-31 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5664450A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147152A (ja) * 1982-02-26 1983-09-01 Fujitsu Ltd 半導体装置の製造方法
JPS58202553A (ja) * 1982-05-21 1983-11-25 Toshiba Corp 半導体装置
JPS60183739A (ja) * 1984-03-01 1985-09-19 Ricoh Co Ltd 多層配線形成法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147152A (ja) * 1982-02-26 1983-09-01 Fujitsu Ltd 半導体装置の製造方法
JPS58202553A (ja) * 1982-05-21 1983-11-25 Toshiba Corp 半導体装置
JPS60183739A (ja) * 1984-03-01 1985-09-19 Ricoh Co Ltd 多層配線形成法

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