JPS5727034A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5727034A
JPS5727034A JP10271380A JP10271380A JPS5727034A JP S5727034 A JPS5727034 A JP S5727034A JP 10271380 A JP10271380 A JP 10271380A JP 10271380 A JP10271380 A JP 10271380A JP S5727034 A JPS5727034 A JP S5727034A
Authority
JP
Japan
Prior art keywords
film
wiring
polycrystal
psg
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10271380A
Other languages
Japanese (ja)
Inventor
Juro Yasui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP10271380A priority Critical patent/JPS5727034A/en
Publication of JPS5727034A publication Critical patent/JPS5727034A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE:To obtain multilayer wiring structure, in which wiring does not short- circuit mutually and which has large dielectric resistance, by forming an insulating film consisting of the three layers of the first insulating film, a thermally oxidized film converted from a polycrystal semiconductor film and a fluidized PSG film on a substrate to which lower wiring is shaped. CONSTITUTION:A field oxide film 2, a gate oxide film 3, N type source and drain regions 4, a gate electrode in polycrystal Si and the lower wiring 5 are shaped to the P type Si substrate 1, and the CVDSiO2 film 6, which is the first insulating film and functions as a stopper for succeeding thermal oxidation, is molded. The polycrystal Si film 7 of the semiconductor film is formed on the film 6, and the PSG film 8 containing phosphorus is furhter shaped. The polycrystal Si film 7 is converted into the thermally oxidized film 70 through heat treatment at 1,000 deg.C while the PSG film 8 is fluidized, and the PSG films on the end sections of the lower wiring 5 are smoothed. Accordingly, a cause of a short circuit among the wiring is removed, and the insulating film among the wiring having large dielectric resistance can be manufactured.
JP10271380A 1980-07-25 1980-07-25 Manufacture of semiconductor device Pending JPS5727034A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10271380A JPS5727034A (en) 1980-07-25 1980-07-25 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10271380A JPS5727034A (en) 1980-07-25 1980-07-25 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5727034A true JPS5727034A (en) 1982-02-13

Family

ID=14334900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10271380A Pending JPS5727034A (en) 1980-07-25 1980-07-25 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5727034A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6261849A (en) * 1985-09-10 1987-03-18 Shin Meiwa Ind Co Ltd Top lid fastening device for carrier vehicle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6261849A (en) * 1985-09-10 1987-03-18 Shin Meiwa Ind Co Ltd Top lid fastening device for carrier vehicle

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