JPS5664336A - Minute pattern forming method - Google Patents

Minute pattern forming method

Info

Publication number
JPS5664336A
JPS5664336A JP14008279A JP14008279A JPS5664336A JP S5664336 A JPS5664336 A JP S5664336A JP 14008279 A JP14008279 A JP 14008279A JP 14008279 A JP14008279 A JP 14008279A JP S5664336 A JPS5664336 A JP S5664336A
Authority
JP
Japan
Prior art keywords
minute pattern
epoxidized
diallyl
rays
forming method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14008279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6134654B2 (cg-RX-API-DMAC7.html
Inventor
Kazuo Toda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14008279A priority Critical patent/JPS5664336A/ja
Publication of JPS5664336A publication Critical patent/JPS5664336A/ja
Publication of JPS6134654B2 publication Critical patent/JPS6134654B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP14008279A 1979-10-30 1979-10-30 Minute pattern forming method Granted JPS5664336A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14008279A JPS5664336A (en) 1979-10-30 1979-10-30 Minute pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14008279A JPS5664336A (en) 1979-10-30 1979-10-30 Minute pattern forming method

Publications (2)

Publication Number Publication Date
JPS5664336A true JPS5664336A (en) 1981-06-01
JPS6134654B2 JPS6134654B2 (cg-RX-API-DMAC7.html) 1986-08-08

Family

ID=15260532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14008279A Granted JPS5664336A (en) 1979-10-30 1979-10-30 Minute pattern forming method

Country Status (1)

Country Link
JP (1) JPS5664336A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4756989A (en) * 1984-07-11 1988-07-12 Asahi Kasei Kogyo Kabushiki Kaisha Image-forming materials sensitive to high-energy beam
JP2014184867A (ja) * 2013-03-25 2014-10-02 Honda Motor Co Ltd 鞍乗型車両
JP2020170863A (ja) * 2015-12-03 2020-10-15 大日本印刷株式会社 インプリントモールド

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4756989A (en) * 1984-07-11 1988-07-12 Asahi Kasei Kogyo Kabushiki Kaisha Image-forming materials sensitive to high-energy beam
JP2014184867A (ja) * 2013-03-25 2014-10-02 Honda Motor Co Ltd 鞍乗型車両
JP2020170863A (ja) * 2015-12-03 2020-10-15 大日本印刷株式会社 インプリントモールド

Also Published As

Publication number Publication date
JPS6134654B2 (cg-RX-API-DMAC7.html) 1986-08-08

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