JPS6134654B2 - - Google Patents
Info
- Publication number
- JPS6134654B2 JPS6134654B2 JP54140082A JP14008279A JPS6134654B2 JP S6134654 B2 JPS6134654 B2 JP S6134654B2 JP 54140082 A JP54140082 A JP 54140082A JP 14008279 A JP14008279 A JP 14008279A JP S6134654 B2 JPS6134654 B2 JP S6134654B2
- Authority
- JP
- Japan
- Prior art keywords
- polymer
- resolution
- sensitivity
- diallyl
- ortho
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14008279A JPS5664336A (en) | 1979-10-30 | 1979-10-30 | Minute pattern forming method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14008279A JPS5664336A (en) | 1979-10-30 | 1979-10-30 | Minute pattern forming method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5664336A JPS5664336A (en) | 1981-06-01 |
| JPS6134654B2 true JPS6134654B2 (cg-RX-API-DMAC7.html) | 1986-08-08 |
Family
ID=15260532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14008279A Granted JPS5664336A (en) | 1979-10-30 | 1979-10-30 | Minute pattern forming method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5664336A (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2163435B (en) * | 1984-07-11 | 1987-07-22 | Asahi Chemical Ind | Image-forming materials sensitive to high-energy beam |
| JP6147534B2 (ja) * | 2013-03-25 | 2017-06-14 | 本田技研工業株式会社 | 鞍乗型車両 |
| JP6965969B2 (ja) * | 2015-12-03 | 2021-11-10 | 大日本印刷株式会社 | インプリントモールド |
-
1979
- 1979-10-30 JP JP14008279A patent/JPS5664336A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5664336A (en) | 1981-06-01 |
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