JPS5660045A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5660045A
JPS5660045A JP13685179A JP13685179A JPS5660045A JP S5660045 A JPS5660045 A JP S5660045A JP 13685179 A JP13685179 A JP 13685179A JP 13685179 A JP13685179 A JP 13685179A JP S5660045 A JPS5660045 A JP S5660045A
Authority
JP
Japan
Prior art keywords
capacitor
type
plane
electrode
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13685179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6322068B2 (enrdf_load_stackoverflow
Inventor
Yutaka Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13685179A priority Critical patent/JPS5660045A/ja
Publication of JPS5660045A publication Critical patent/JPS5660045A/ja
Publication of JPS6322068B2 publication Critical patent/JPS6322068B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors
    • H10D1/665—Trench conductor-insulator-semiconductor capacitors, e.g. trench MOS capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP13685179A 1979-10-23 1979-10-23 Semiconductor device Granted JPS5660045A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13685179A JPS5660045A (en) 1979-10-23 1979-10-23 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13685179A JPS5660045A (en) 1979-10-23 1979-10-23 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5660045A true JPS5660045A (en) 1981-05-23
JPS6322068B2 JPS6322068B2 (enrdf_load_stackoverflow) 1988-05-10

Family

ID=15184980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13685179A Granted JPS5660045A (en) 1979-10-23 1979-10-23 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5660045A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184555A (ja) * 1983-04-02 1984-10-19 Nippon Telegr & Teleph Corp <Ntt> 半導体集積回路装置およびその製造方法
KR101015009B1 (ko) * 2008-04-18 2011-02-16 주식회사 케이이씨 커패시터 및 그 제조 방법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5269589A (en) * 1975-12-08 1977-06-09 Hitachi Ltd Semiconductor capacity element
JPS5376686A (en) * 1976-12-17 1978-07-07 Nec Corp Semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5269589A (en) * 1975-12-08 1977-06-09 Hitachi Ltd Semiconductor capacity element
JPS5376686A (en) * 1976-12-17 1978-07-07 Nec Corp Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184555A (ja) * 1983-04-02 1984-10-19 Nippon Telegr & Teleph Corp <Ntt> 半導体集積回路装置およびその製造方法
KR101015009B1 (ko) * 2008-04-18 2011-02-16 주식회사 케이이씨 커패시터 및 그 제조 방법

Also Published As

Publication number Publication date
JPS6322068B2 (enrdf_load_stackoverflow) 1988-05-10

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