JPS5655061A - Integrated semiconductor device - Google Patents
Integrated semiconductor deviceInfo
- Publication number
- JPS5655061A JPS5655061A JP13002679A JP13002679A JPS5655061A JP S5655061 A JPS5655061 A JP S5655061A JP 13002679 A JP13002679 A JP 13002679A JP 13002679 A JP13002679 A JP 13002679A JP S5655061 A JPS5655061 A JP S5655061A
- Authority
- JP
- Japan
- Prior art keywords
- recessed
- pattern
- wire
- etched
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 238000005530 etching Methods 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 230000002265 prevention Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Landscapes
- Element Separation (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13002679A JPS5655061A (en) | 1979-10-11 | 1979-10-11 | Integrated semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13002679A JPS5655061A (en) | 1979-10-11 | 1979-10-11 | Integrated semiconductor device |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9453786A Division JPS61234054A (ja) | 1986-04-25 | 1986-04-25 | 集積半導体装置 |
| JP9453686A Division JPS61234053A (ja) | 1986-04-25 | 1986-04-25 | 集積半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5655061A true JPS5655061A (en) | 1981-05-15 |
| JPS6148261B2 JPS6148261B2 (enrdf_load_stackoverflow) | 1986-10-23 |
Family
ID=15024313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13002679A Granted JPS5655061A (en) | 1979-10-11 | 1979-10-11 | Integrated semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5655061A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7681689B2 (en) | 2002-09-02 | 2010-03-23 | Komatsu Ltd. | Vibration damping device and bucket for construction machine |
-
1979
- 1979-10-11 JP JP13002679A patent/JPS5655061A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7681689B2 (en) | 2002-09-02 | 2010-03-23 | Komatsu Ltd. | Vibration damping device and bucket for construction machine |
| US7743881B2 (en) | 2002-09-02 | 2010-06-29 | Komatsu Ltd. | Vibration damping device and bucket for construction machine |
| US8438759B2 (en) | 2002-09-02 | 2013-05-14 | Komatsu, Ltd. | Vibration damping device and bucket for construction machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6148261B2 (enrdf_load_stackoverflow) | 1986-10-23 |
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