JPS5649577A - Preparation of solid image pickup element - Google Patents
Preparation of solid image pickup elementInfo
- Publication number
- JPS5649577A JPS5649577A JP12590479A JP12590479A JPS5649577A JP S5649577 A JPS5649577 A JP S5649577A JP 12590479 A JP12590479 A JP 12590479A JP 12590479 A JP12590479 A JP 12590479A JP S5649577 A JPS5649577 A JP S5649577A
- Authority
- JP
- Japan
- Prior art keywords
- image pickup
- mask
- pickup element
- control gate
- overflow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007787 solid Substances 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 238000005468 ion implantation Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 230000004304 visual acuity Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14887—Blooming suppression
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12590479A JPS5649577A (en) | 1979-09-28 | 1979-09-28 | Preparation of solid image pickup element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12590479A JPS5649577A (en) | 1979-09-28 | 1979-09-28 | Preparation of solid image pickup element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5649577A true JPS5649577A (en) | 1981-05-06 |
JPS6115588B2 JPS6115588B2 (ja) | 1986-04-24 |
Family
ID=14921778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12590479A Granted JPS5649577A (en) | 1979-09-28 | 1979-09-28 | Preparation of solid image pickup element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5649577A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5846670A (ja) * | 1981-08-27 | 1983-03-18 | ア−ルシ−エ−・コ−ポレ−シヨン | 埋込みチヤンネル型電荷結合装置の製造法 |
JPH03504934A (ja) * | 1988-08-25 | 1991-10-31 | 株式会社デニックス | 歯科用レーザ装置 |
WO2010068252A1 (en) * | 2008-12-10 | 2010-06-17 | Eastman Kodak Company | Image sensors with lateral overflow drains |
US8772891B2 (en) | 2008-12-10 | 2014-07-08 | Truesense Imaging, Inc. | Lateral overflow drain and channel stop regions in image sensors |
-
1979
- 1979-09-28 JP JP12590479A patent/JPS5649577A/ja active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5846670A (ja) * | 1981-08-27 | 1983-03-18 | ア−ルシ−エ−・コ−ポレ−シヨン | 埋込みチヤンネル型電荷結合装置の製造法 |
JPH03504934A (ja) * | 1988-08-25 | 1991-10-31 | 株式会社デニックス | 歯科用レーザ装置 |
WO2010068252A1 (en) * | 2008-12-10 | 2010-06-17 | Eastman Kodak Company | Image sensors with lateral overflow drains |
CN102246303A (zh) * | 2008-12-10 | 2011-11-16 | 伊斯曼柯达公司 | 具有横向溢流排出通道的图像传感器 |
US8772891B2 (en) | 2008-12-10 | 2014-07-08 | Truesense Imaging, Inc. | Lateral overflow drain and channel stop regions in image sensors |
US8994139B2 (en) | 2008-12-10 | 2015-03-31 | Semiconductor Components Industries, Llc | Lateral overflow drain and channel stop regions in image sensors |
EP3182455A3 (en) * | 2008-12-10 | 2017-08-30 | Semiconductor Components Industries, LLC | Image sensors with lateral overflow drains |
Also Published As
Publication number | Publication date |
---|---|
JPS6115588B2 (ja) | 1986-04-24 |
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