JPS5643763A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5643763A
JPS5643763A JP11900879A JP11900879A JPS5643763A JP S5643763 A JPS5643763 A JP S5643763A JP 11900879 A JP11900879 A JP 11900879A JP 11900879 A JP11900879 A JP 11900879A JP S5643763 A JPS5643763 A JP S5643763A
Authority
JP
Japan
Prior art keywords
forming region
element forming
sio2 layer
shallow
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11900879A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232790B2 (enrdf_load_stackoverflow
Inventor
Yasuhisa Sato
Daijiro Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11900879A priority Critical patent/JPS5643763A/ja
Publication of JPS5643763A publication Critical patent/JPS5643763A/ja
Publication of JPH0232790B2 publication Critical patent/JPH0232790B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP11900879A 1979-09-17 1979-09-17 Manufacture of semiconductor device Granted JPS5643763A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11900879A JPS5643763A (en) 1979-09-17 1979-09-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11900879A JPS5643763A (en) 1979-09-17 1979-09-17 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5643763A true JPS5643763A (en) 1981-04-22
JPH0232790B2 JPH0232790B2 (enrdf_load_stackoverflow) 1990-07-23

Family

ID=14750702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11900879A Granted JPS5643763A (en) 1979-09-17 1979-09-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5643763A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4874977A (enrdf_load_stackoverflow) * 1971-12-28 1973-10-09
JPS5221781A (en) * 1975-08-12 1977-02-18 Nec Corp Semiconductor unit producing system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4874977A (enrdf_load_stackoverflow) * 1971-12-28 1973-10-09
JPS5221781A (en) * 1975-08-12 1977-02-18 Nec Corp Semiconductor unit producing system

Also Published As

Publication number Publication date
JPH0232790B2 (enrdf_load_stackoverflow) 1990-07-23

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