JPS5639536A - Ionizing radiation sensitive resist - Google Patents
Ionizing radiation sensitive resistInfo
- Publication number
- JPS5639536A JPS5639536A JP11494879A JP11494879A JPS5639536A JP S5639536 A JPS5639536 A JP S5639536A JP 11494879 A JP11494879 A JP 11494879A JP 11494879 A JP11494879 A JP 11494879A JP S5639536 A JPS5639536 A JP S5639536A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- radiation sensitive
- ionizing radiation
- alkylmethacrylate
- thence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11494879A JPS5639536A (en) | 1979-09-07 | 1979-09-07 | Ionizing radiation sensitive resist |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11494879A JPS5639536A (en) | 1979-09-07 | 1979-09-07 | Ionizing radiation sensitive resist |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5639536A true JPS5639536A (en) | 1981-04-15 |
Family
ID=14650612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11494879A Pending JPS5639536A (en) | 1979-09-07 | 1979-09-07 | Ionizing radiation sensitive resist |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5639536A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5376825A (en) * | 1976-12-20 | 1978-07-07 | Cho Lsi Gijutsu Kenkyu Kumiai | Radiation sensitive positive regist material |
-
1979
- 1979-09-07 JP JP11494879A patent/JPS5639536A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5376825A (en) * | 1976-12-20 | 1978-07-07 | Cho Lsi Gijutsu Kenkyu Kumiai | Radiation sensitive positive regist material |
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