JPS5637298A - Prefabricated barrel type susceptor - Google Patents

Prefabricated barrel type susceptor

Info

Publication number
JPS5637298A
JPS5637298A JP11398279A JP11398279A JPS5637298A JP S5637298 A JPS5637298 A JP S5637298A JP 11398279 A JP11398279 A JP 11398279A JP 11398279 A JP11398279 A JP 11398279A JP S5637298 A JPS5637298 A JP S5637298A
Authority
JP
Japan
Prior art keywords
pieces
susceptor
support frame
wafers
silicon carbide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11398279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6220159B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Yamazaki
Katsumi Hoshina
Nobuyuki Ueshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP11398279A priority Critical patent/JPS5637298A/ja
Publication of JPS5637298A publication Critical patent/JPS5637298A/ja
Publication of JPS6220159B2 publication Critical patent/JPS6220159B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP11398279A 1979-09-05 1979-09-05 Prefabricated barrel type susceptor Granted JPS5637298A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11398279A JPS5637298A (en) 1979-09-05 1979-09-05 Prefabricated barrel type susceptor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11398279A JPS5637298A (en) 1979-09-05 1979-09-05 Prefabricated barrel type susceptor

Publications (2)

Publication Number Publication Date
JPS5637298A true JPS5637298A (en) 1981-04-10
JPS6220159B2 JPS6220159B2 (enrdf_load_stackoverflow) 1987-05-06

Family

ID=14626084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11398279A Granted JPS5637298A (en) 1979-09-05 1979-09-05 Prefabricated barrel type susceptor

Country Status (1)

Country Link
JP (1) JPS5637298A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57155484A (en) * 1981-03-17 1982-09-25 Showa Koki Kk Balancer for lifting and falling window
JPS6394633A (ja) * 1986-10-09 1988-04-25 Hitachi Electronics Eng Co Ltd 気相反応装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57155484A (en) * 1981-03-17 1982-09-25 Showa Koki Kk Balancer for lifting and falling window
JPS6394633A (ja) * 1986-10-09 1988-04-25 Hitachi Electronics Eng Co Ltd 気相反応装置

Also Published As

Publication number Publication date
JPS6220159B2 (enrdf_load_stackoverflow) 1987-05-06

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