JPS5637297A - Prefabricated barrel type susceptor - Google Patents

Prefabricated barrel type susceptor

Info

Publication number
JPS5637297A
JPS5637297A JP11398179A JP11398179A JPS5637297A JP S5637297 A JPS5637297 A JP S5637297A JP 11398179 A JP11398179 A JP 11398179A JP 11398179 A JP11398179 A JP 11398179A JP S5637297 A JPS5637297 A JP S5637297A
Authority
JP
Japan
Prior art keywords
susceptor
gas
pieces
wafers
hook
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11398179A
Other languages
Japanese (ja)
Other versions
JPS6155766B2 (en
Inventor
Hiroshi Yamazaki
Katsumi Hoshina
Nobuyuki Ueshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP11398179A priority Critical patent/JPS5637297A/en
Publication of JPS5637297A publication Critical patent/JPS5637297A/en
Publication of JPS6155766B2 publication Critical patent/JPS6155766B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To prevent the occurrence of gaps in the contact parts of a prefabricated barrel type susceptor and enable a gas to flow uniformly by forming the sides of each platelike piece of the susceptor into hook shape and interlocking the hook- shaped parts of the adjacent pieces with each other.
CONSTITUTION: A plurality of wafers 21... are set in circular recesses 16... of six platelike pieces 14... of the susceptor, the susceptor is placed in a bell jar (not shown), and the lamps in the jar are switched on to heat wafers 21.... While rotating the susceptor with shaft 17, a predetermined amount of silicon gas is fed from a vapordepositing gas introducing member over the susceptor. The gas flows along the surface of each piece 14 holding wafers 21.... Since adjacent pieces 14, 14 have been interlocked with each other through hook-shaped sides 15, 15, no gap occurs even if the pieces are curved or warped, and the gas flow is stabilized to obtain homogeneous epitaxially-grown layers.
COPYRIGHT: (C)1981,JPO&Japio
JP11398179A 1979-09-05 1979-09-05 Prefabricated barrel type susceptor Granted JPS5637297A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11398179A JPS5637297A (en) 1979-09-05 1979-09-05 Prefabricated barrel type susceptor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11398179A JPS5637297A (en) 1979-09-05 1979-09-05 Prefabricated barrel type susceptor

Publications (2)

Publication Number Publication Date
JPS5637297A true JPS5637297A (en) 1981-04-10
JPS6155766B2 JPS6155766B2 (en) 1986-11-29

Family

ID=14626058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11398179A Granted JPS5637297A (en) 1979-09-05 1979-09-05 Prefabricated barrel type susceptor

Country Status (1)

Country Link
JP (1) JPS5637297A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038813A (en) * 1983-07-08 1985-02-28 ウルトラ　カーボン　コーポレーシヨン Susceptor assembly
JPH0774114A (en) * 1993-09-03 1995-03-17 Komatsu Electron Metals Co Ltd Barrel type susceptor for vapor phase epitaxy
JP2007242648A (en) * 2006-03-04 2007-09-20 Masato Toshima Substrate processing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038813A (en) * 1983-07-08 1985-02-28 ウルトラ　カーボン　コーポレーシヨン Susceptor assembly
JPH0774114A (en) * 1993-09-03 1995-03-17 Komatsu Electron Metals Co Ltd Barrel type susceptor for vapor phase epitaxy
JP2007242648A (en) * 2006-03-04 2007-09-20 Masato Toshima Substrate processing apparatus

Also Published As

Publication number Publication date
JPS6155766B2 (en) 1986-11-29

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