JPS6220159B2 - - Google Patents
Info
- Publication number
- JPS6220159B2 JPS6220159B2 JP11398279A JP11398279A JPS6220159B2 JP S6220159 B2 JPS6220159 B2 JP S6220159B2 JP 11398279 A JP11398279 A JP 11398279A JP 11398279 A JP11398279 A JP 11398279A JP S6220159 B2 JPS6220159 B2 JP S6220159B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- pieces
- support frame
- susceptor
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 10
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 229910021383 artificial graphite Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11398279A JPS5637298A (en) | 1979-09-05 | 1979-09-05 | Prefabricated barrel type susceptor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11398279A JPS5637298A (en) | 1979-09-05 | 1979-09-05 | Prefabricated barrel type susceptor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5637298A JPS5637298A (en) | 1981-04-10 |
| JPS6220159B2 true JPS6220159B2 (enrdf_load_stackoverflow) | 1987-05-06 |
Family
ID=14626084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11398279A Granted JPS5637298A (en) | 1979-09-05 | 1979-09-05 | Prefabricated barrel type susceptor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5637298A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57155484A (en) * | 1981-03-17 | 1982-09-25 | Showa Koki Kk | Balancer for lifting and falling window |
| JPS6394633A (ja) * | 1986-10-09 | 1988-04-25 | Hitachi Electronics Eng Co Ltd | 気相反応装置 |
-
1979
- 1979-09-05 JP JP11398279A patent/JPS5637298A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5637298A (en) | 1981-04-10 |
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