JPS5635774A - Dry etching method - Google Patents

Dry etching method

Info

Publication number
JPS5635774A
JPS5635774A JP10912579A JP10912579A JPS5635774A JP S5635774 A JPS5635774 A JP S5635774A JP 10912579 A JP10912579 A JP 10912579A JP 10912579 A JP10912579 A JP 10912579A JP S5635774 A JPS5635774 A JP S5635774A
Authority
JP
Japan
Prior art keywords
etched
film
mask
wiring
dry etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10912579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6227155B2 (cg-RX-API-DMAC7.html
Inventor
Katsumi Ogiue
Yoshinori Kureishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP10912579A priority Critical patent/JPS5635774A/ja
Publication of JPS5635774A publication Critical patent/JPS5635774A/ja
Publication of JPS6227155B2 publication Critical patent/JPS6227155B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
JP10912579A 1979-08-29 1979-08-29 Dry etching method Granted JPS5635774A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10912579A JPS5635774A (en) 1979-08-29 1979-08-29 Dry etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10912579A JPS5635774A (en) 1979-08-29 1979-08-29 Dry etching method

Publications (2)

Publication Number Publication Date
JPS5635774A true JPS5635774A (en) 1981-04-08
JPS6227155B2 JPS6227155B2 (cg-RX-API-DMAC7.html) 1987-06-12

Family

ID=14502188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10912579A Granted JPS5635774A (en) 1979-08-29 1979-08-29 Dry etching method

Country Status (1)

Country Link
JP (1) JPS5635774A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0522899A (ja) * 1991-07-10 1993-01-29 Akiko Uchiumi 自動車のタイヤの回転により電気を作る方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5432143A (en) * 1977-08-17 1979-03-09 Hitachi Ltd Etching process

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5432143A (en) * 1977-08-17 1979-03-09 Hitachi Ltd Etching process

Also Published As

Publication number Publication date
JPS6227155B2 (cg-RX-API-DMAC7.html) 1987-06-12

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